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App. No. 12/653,585 · Confirmation No. 2265

Extreme ultraviolet light source

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2012-02-10 ABN Abandonment 2 View
2011-06-21 CTNF Non-Final Rejection 7 View
2011-06-21 892 List of references cited by examiner 1 View
2011-06-21 BIB Bibliographic Data Sheet 1 View
2011-06-21 SRNT Examiner's search strategy and results 3 View
2011-06-21 1449 List of References cited by applicant and considered by examiner 1 View
2011-06-21 SRFW Search information including classification, databases and other search related notes 1 View
2011-06-21 1449 List of References cited by applicant and considered by examiner 5 View
2011-06-21 1449 List of References cited by applicant and considered by examiner 1 View
2011-06-21 FWCLM Index of Claims 1 View
2010-07-15 NTC.PUB Notice of Publication 1 View
2010-04-07 APP.FILE.REC Filing Receipt 3 View
2010-03-23 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-03-23 FOR Foreign Reference 17 View
2010-03-23 FOR Foreign Reference 31 View
2010-03-23 FOR Foreign Reference 8 View
2010-03-23 FOR Foreign Reference 40 View
2010-03-23 TRAN.LET Transmittal Letter 2 View
2010-03-22 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2010-03-22 DRW Drawings-only black and white line drawings 51 View
2010-03-22 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2010-03-03 NT.INC.REPLY Notice of Incomplete Reply 2 View
2010-02-22 R48.REQ Request under Rule 48 correcting inventorship 2 View
2010-02-22 TRAN.LET Transmittal Letter 1 View
2010-02-22 TRAN.LET Transmittal Letter 1 View
2010-02-22 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2010-02-22 DRW Drawings-only black and white line drawings 51 View
2010-02-22 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2010-02-22 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2010-02-12 A.PE Preliminary Amendment 1 View
2010-02-12 CLM Claims 3 View
2010-02-12 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2010-02-12 TRAN.LET Transmittal Letter 1 View
2010-02-04 NT.CR.APP.PA Notice to File Corrected Application Papers 2 View
2010-02-04 APP.FILE.REC Filing Receipt 3 View
2009-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2009-12-14 TRAN.LET Transmittal Letter 3 View
2009-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-12-14 FOR Foreign Reference 1 View
2009-12-14 FOR Foreign Reference 1 View
2009-12-14 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2009-12-14 WFEE Fee Worksheet (SB06) 1 View
2009-12-14 WFEE Fee Worksheet (SB06) 1 View
2009-12-14 TRNA Transmittal of New Application 2 View
2009-12-14 ADS Application Data Sheet 3 View
2009-12-14 OATH Oath or Declaration filed 5 View
2009-12-14 SPEC Specification 82 View
2009-12-14 CLM Claims 1 View
2009-12-14 ABST Abstract 1 View
2009-12-14 DRW Drawings-only black and white line drawings 51 View
2009-12-14 TRAN.LET Transmittal Letter 2 View
2009-12-14 136A Authorization for Extension of Time all replies 2 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
0001-01-03 APPENDIX.SUPP Appendix to the specification — View
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Quick Facts
App. No.
12/653,585
Filed
2009-12-14
Pub. No.
US20100176313A1
Art Unit
2881