Organic light emitting diode display
View Patent ↗An organic light emitting diode (OLED) display includes a substrate main body, an OLED formed on the substrate main body, a moisture absorbing layer formed on the substrate main body and covering the OLED, a first barrier layer formed on the substrate main body and covering the moisture absorbing layer, a first auxiliary barrier layer formed between the moisture absorbing layer and the first barrier layer, a second barrier layer formed on the substrate main body and covering the first barrier layer, and a second auxiliary barrier layer formed between the first barrier layer and the second barrier layer.
1. An organic light emitting diode (OLED) display device, comprising:
a substrate main body;
an OLED formed on the substrate main body; and
a thin film encapsulation layer consisting of
a moisture absorbing layer formed on the substrate main body and covering the OLED;
a first barrier layer formed on the substrate main body and covering the moisture absorbing layer;
a first auxiliary barrier layer formed between the moisture absorbing layer and the first barrier layer;
a second barrier layer formed on the substrate main body and covering the first barrier layer; and
a second auxiliary barrier layer formed between the first barrier layer and the second barrier layer, materials of the moisture absorbing layer, the first barrier layer, the first auxiliary barrier layer, the second barrier layer, and the second auxiliary barrier layer being different from each other.
2. The OLED display device of claim 1 , wherein the moisture absorbing layer is formed of a material including one selected from the group consisting of silicon monoxide (SiO), calcium monoxide (CaO), barium monoxide (BaO), and combinations thereof.
3. The OLED display device of claim 2 , wherein the moisture absorbing layer is formed through a thermal evaporation process.
4. The OLED display device of claim 3 , wherein the thermal evaporation process is performed by using a vacuum evaporation method.
5. The OLED display device of claim 1 , wherein each of the first barrier layer and the second barrier layer is formed of a material including one selected from the group consisting of Al 2 O 3 , TiO 2 , ZrO, SiO 2 , AlON, AN, SiON, Si 3 N 4 , ZnO, Ta 2 O 5 , and combinations thereof.
6. The OLED display device of claim 5 , wherein each of the first barrier layer and the second barrier layer is formed through an atomic layer deposition (ALD) method.
7. The OLED display device of claim 1 , wherein the first auxiliary barrier layer is formed in an interface between the first barrier layer and the moisture absorbing layer through reaction therebetween, and includes at least a partial component of the first barrier layer and at least a partial component of the moisture absorbing layer.
8. The OLED display device of claim 1 , wherein the second auxiliary barrier layer is formed in an interface between the second barrier layer and the first barrier layer through reaction therebetween, and includes at least a partial component of the second barrier layer and at least a partial component of the first barrier layer.
9. The OLED display device of claim 1 , wherein the moisture absorbing layer, the first auxiliary barrier layer, the first barrier layer, the second auxiliary barrier layer, and the second barrier layer form a thin film encapsulation layer that protects the OLED, and the entire thickness of the thin film encapsulation layer is in a range of 1 nm to 1000 nm.
10. A manufacturing method of an organic light emitting diode (OLED) display device, comprising;
forming an OLED on a substrate main body;
forming a moisture absorbing layer that covers the OLED through a thermal evaporation process to form a thin film encapsulation layer;
forming a first barrier layer that covers the moisture absorbing layer through an atomic layer deposition (ALD) method to form the thin film encapsulation layer;
forming a first auxiliary barrier layer in an interface between the first barrier layer and the moisture absorbing layer through reaction therebetween to form the thin film encapsulation layer;
forming a second barrier layer that covers the first barrier layer through the ALD method to form the thin film encapsulation layer; and
forming a second auxiliary barrier layer in an interface between the second barrier layer and the first barrier layer through reaction therebetween to form the thin film encapsulation layer, materials of the moisture absorbing layer, the first barrier layer, the first auxiliary barrier layer, the second barrier layer, and the second auxiliary barrier layer being different from each other, the thin film encapsulation layer consisting of the moisture absorbing layer, the first barrier layer, the first auxiliary barrier layer, the second barrier layer and the second auxiliary barrier layer.
11. The manufacturing method of claim 10 , wherein the moisture absorbing layer is formed of a material including one selected from the group consisting of silicon monoxide (SiO), calcium monoxide (CaO), barium monoxide (BaO), and combinations thereof.
12. The manufacturing method of claim 11 , wherein the moisture absorbing layer is formed through a thermal evaporation process.
13. The manufacturing method of claim 12 , wherein the thermal evaporation process includes a vacuum evaporation method.
14. The manufacturing method of claim 13 , wherein the moisture absorbing layer is made by deposition of silicon monoxide that is formed from reaction of silicon dioxide (SiO 2 ) and silicon gas.
15. The manufacturing method of claim 10 , wherein each of the first barrier layer and the second barrier layer is formed of a material including one selected from the group consisting of Al 2 O 3 , TiO 2 , ZrO, SiO 2 , AlON, AN, SiON, Si 3 N 4 , ZnO, Ta 2 O 5 , and combinations thereof.
16. The manufacturing method of claim 10 , wherein the first auxiliary barrier layer includes at least a partial component of the first barrier layer and at least a partial component of the moisture absorbing layer, and is made of a material that is different from materials of the first barrier layer and the moisture absorbing layer.
17. The manufacturing method of claim 10 , wherein the second auxiliary barrier layer includes at least a partial component of the second barrier layer and at least a partial component of the first barrier layer, and is made of a material that is different from materials of the second barrier layer and the first barrier layer.
18. The manufacturing method of claim 10 , wherein the moisture absorbing layer, the first auxiliary barrier layer, the first barrier layer, the second auxiliary barrier layer, and the second barrier layer form a thin film encapsulation layer that protects the OLED, and the entire thickness of the thin film encapsulation layer is in a range of 1 nm to 1000 nm.