Mask assembly and deposition and apparatus for a flat panel display using the same
View Patent ↗A mask assembly includes a mask frame, the mask frame having an opening and a frame surrounding the opening, a pattern mask on the mask frame, the pattern mask including a pattern portion having at least one pattern overlapping the opening and a welding portion attached to the frame, and at least one support bar crossing the opening and attached to the pattern mask.
1. A mask assembly, comprising:
a mask frame, the mask frame having an opening and a frame surrounding the opening;
a pattern mask on the mask frame, the pattern mask including:
a pattern portion having a plurality of patterns spaced apart from each other and overlapping the opening, and
a welding portion attached to the frame, wherein the welding portion extends in a first direction, the first direction being parallel to a longitudinal side of the pattern mask; and
at least one support bar crossing the opening and attached to the pattern mask, the support bar being positioned between patterns of the pattern mask,
wherein the support bar extends in a second direction to cross the opening, the second direction being perpendicular to a longitudinal side of the pattern mask.
2. The mask assembly as claimed in claim 1 wherein the support bar and the patterns of the pattern mask overlap completely different parts of the opening.
3. The mask assembly as claimed in claim 2 , wherein the mask assembly includes a plurality of support bars, the support bars being spaced apart from each other along the first direction.
4. The mask assembly as claimed in claim 1 , wherein the frame has grooves for accommodating ends of the support bar.
5. The mask assembly as claimed in claim 4 , wherein the grooves have a depth substantially equal to a thickness of the support bar.
6. The mask assembly as claimed in claim 1 , wherein the pattern mask is a fine metal mask.
7. The mask assembly as claimed in claim 1 , wherein the support bar includes a substantially same material as the mask frame.
8. The mask assembly as claimed in claim 1 , wherein a welding point between the pattern mask and the support bar is disposed between the patterns of the pattern mask.
9. The mask assembly as claimed in claim 1 , wherein the pattern includes at least one slit.
10. The mask assembly as claimed in claim 1 , wherein the support bar is between the opening and the mask pattern.
11. A deposition apparatus for a flat panel display, comprising:
a chamber;
a deposition source disposed at a lower portion of the chamber; and
a mask assembly disposed over the deposition source and configured to support a substrate, the mask assembly including:
a mask frame, the mask frame having an opening and a frame surrounding the opening;
a pattern mask on the mask frame, the pattern mask including:
a pattern portion having a plurality of patterns spaced apart from each other and overlapping the opening, and
a welding portion attached to the frame, and
at least one support bar crossing the opening and attached to the pattern mask, the support bar being positioned between patterns of the pattern mask,
wherein the support bar extends in a region not overlapping any of the patterns of the pattern mask, and a plurality of welding points between the support bar and the pattern mask, spaced apart from each other along a direction of the support bar being disposed on the support bar between the plurality of patterns.
12. The deposition apparatus as claimed in claim 11 , wherein the welding portion extends in a first direction, the first direction being parallel to a longitudinal side of the pattern mask.
13. The deposition apparatus as claimed in claim 12 , wherein the support bar extends in a second direction to cross the opening, the second direction being perpendicular to the first direction.
14. The deposition apparatus as claimed in claim 13 , wherein the mask assembly includes a plurality of support bars, the support bars being spaced apart from each other along the first direction.
15. The deposition apparatus as claimed in claim 11 , wherein the frame has grooves for accommodating ends of the support bar.
16. The deposition apparatus as claimed in claim 15 , wherein the grooves have a depth substantially equal to a thickness of the support bar.
17. The deposition apparatus as claimed in claim 11 , wherein a welding point between the pattern mask and the support bar is disposed between the patterns of the pattern mask.
18. The deposition apparatus as claimed in claim 11 , further comprising a fixing member for fixing the mask assembly.