Solid-state image pickup apparatus and method of manufacturing the same
View Patent ↗Disclosed is a solid-state image pickup apparatus including a semiconductor substrate, a photoelectric converter, a transfer gate, an insulating layer, a first silicon layer, and a pixel transistor portion. The photoelectric converter converts light energy of incident light into electrical energy and obtains a signal charge. The photoelectric converter is formed on a surface side in the semiconductor substrate. The transfer gate reads the signal charge from the photoelectric converter, and the transfer gate is formed on the semiconductor substrate adjacent to the photoelectric converter. The insulating layer is formed on the photoelectric converter in the semiconductor substrate. The first silicon layer is formed on the insulating layer. The pixel transistor portion amplifies and outputs the signal charge read by the transfer gate. The pixel transistor portion is formed on the insulating layer with the first silicon layer being an active region.
1. A solid-state image pickup apparatus, comprising:
a semiconductor substrate;
a photoelectric converter to convert light energy of incident light into electrical energy and obtain a signal charge, the photoelectric converter being formed on a surface side in the semiconductor substrate;
a transfer gate to read the signal charge from the photoelectric converter, the transfer gate being formed on the semiconductor substrate adjacent to the photoelectric converter;
an insulating layer formed on the photoelectric converter in the semiconductor substrate;
a first silicon layer formed on the insulating layer; and
a pixel transistor portion to amplify and output the signal charge read by the transfer gate, the pixel transistor portion being formed on the insulating layer with the first silicon layer being an active region,
wherein the thickness of the insulating layer is in the range of 50 nm to 100 nm, and the thickness of the first silicon layer is in the range of 50 nm to 100 nm.
2. The solid-state image pickup apparatus according to claim 1 ,
wherein the pixel transistor portion includes a reset transistor, an amplifier transistor, and a selection transistor, the amplifier transistor having the active region disposed on the photoelectric converter in a planar layout.
3. The solid-state image pickup apparatus according to claim 1 ,
wherein the insulating layer is also formed on the semiconductor substrate in a vicinity of the photoelectric converter,
the solid-state image pickup apparatus further comprising:
a second silicon layer formed on the insulating layer on the semiconductor substrate except a formation area of the photoelectric converter; and
a logic circuit portion formed on the insulating layer with the second silicon layer being as an active region.
4. The solid-state image pickup apparatus according to claim 3 ,
wherein the pixel transistor portion has a pixel transistor, and the logic circuit portion has a transistor, the pixel transistor and the transistor of the logic circuit portion each being formed of a FinFET.