Differential pressure sensor
View Patent ↗A differential pressure sensor for measuring a pressure difference between two high-pressure environments is comprised of a sensor block including internal, oil-filled channels leading to an internally positioned differential pressure sensor element. Two process diaphragms are provided for transferring pressure from the high-pressure environments for isolating two distinct internal oil channels from the high-pressure environments. In order to achieve small internal oil volumes in the sensor block, additionally two separating discs, which initially separate between the two internal oil channels, are positioned in fluid communication with the high-pressure environments in order to block for the pressure from the high-pressure environments against the oil channels “from behind.” The separating discs bear against abutment faces having small openings into the internal oil channels. The separating discs are preferably given a pre-tension, and the abutment faces are then shaped correspondingly having a slightly convex shape. Preferably, separating discs with no corrugations are used.
1. A differential pressure sensor, comprising;
a sensor block comprising internal, oil-filled channels leading into a cavity with a differential pressure sensor element arranged therein, and comprising two respective process diaphragms arranged on the sensor block being directly exposed to respective high-pressure environments with respective pressures to separate between the high-pressure environments and the internal oil channels and to transfer the respective pressures to the respective channels;
two respective separating discs arranged on the sensor block in fluid communication with the respective high-pressure environments and capable of blocking the respective pressures against the opposite respective of said internal oil channels;
where each of the two respective separating discs bears against a respective abutment face comprising a small opening into that of the oil-filled channels exhibiting the other pressure; and
a transverse channel provided between the respective two oil channels, in which transverse channel the cavity containing the differential pressure sensor element is located.
2. The differential pressure sensor of claim 1 , where the separating discs are pre-tensioned to have a substantially complementary fit to the abutment faces, which has a slightly convex form.
3. The differential pressure sensor of claim 1 , where the separating discs are substantially smooth.