Magnetic disk and magnetic disk manufacturing method
View Patent ↗Provided is a magnetic disk ( 10 ) for a magnetic recording, which comprises a magnetic layer ( 4 ) for a magnetic recording, a protecting layer ( 5 ) formed over the magnetic layer ( 4 ) for protecting the magnetic layer ( 4 ), and a lubricating layer ( 6 ) formed over the protecting layer ( 5 ). The protecting layer ( 5 ) is a layer composed substantially of carbon, hydrogen and nitrogen. The atomic ratio (N/C) of nitrogen and carbon, which was calculated from the spectral intensities of N1s and C1s detected for a detection angle of 7 degrees of photoelectrons by an angularly resolved X-ray photoelectron spectroscopy, is 0.15 to 0.25. This constitution of the protecting layer ( 5 ) is excellent in wear resistance and sliding characteristics even for a film thickness of 3 nm or less and provides a magnetic disk which can avoid a high fly write trouble or the like.
1. A magnetic disk manufacturing method of manufacturing the magnetic disk, said magnetic disc comprising:
a magnetic layer for magnetic recording,
a protective layer formed over said magnetic layer for protecting said magnetic layer, and
a lubricating layer formed over said protective layer,
wherein said protective layer is a layer composed substantially of carbon, hydrogen, and nitrogen and an atomic ratio (N/C) of nitrogen and carbon calculated from intensities of N1s and C1s spectra detected at a photoelectron detection angle of 7° by angularly resolved X-ray photoelectron spectroscopy is 0.15 or more and 0.25 or less,
wherein said protective layer comprises
a hydrogenated carbon protective film composed substantially of carbon and hydrogen and formed over said magnetic layer, and
a surface layer portion containing carbon and nitrogen and formed at a surface portion in contact with said lubricating layer,
said magnetic disk manufacturing method comprising:
forming said hydrogenated carbon protective film in an atmosphere with a vacuum degree of 0.1 Pa or more and less than 2 Pa by a plasma CVD method, and
forming said surface layer portion in an atmosphere with a vacuum degree of more than 2 Pa and 6 Pa or less by the plasma CVD method.
2. A magnetic disk manufacturing method according to claim 1 , further comprising forming said hydrogenated carbon protective film by the plasma CVD method using substantially only a straight-chain saturated hydrocarbon based gas as a reactive gas, but not using a carrier gas.
3. A magnetic disk manufacturing method according to claim 1 , further comprising, after forming said hydrogenated carbon protective film, exposing said hydrogenated carbon protective film to a nitrogen atmosphere to perform a surface treatment of said hydrogenated carbon protective film, thereby forming said surface layer portion.
4. A magnetic disk manufacturing method according to claim 3 , further comprising performing the surface treatment of said hydrogenated carbon protective film while applying an RF bias at a power of 1 W or more and 100 W or less.
5. A magnetic disk manufacturing method according to claim 1 , further comprising, forming said hydrogenated carbon protective film to a thickness of less than 3 nm.
6. A magnetic disk manufacturing method of manufacturing the magnetic disk, said magnetic disc comprising:
a magnetic layer for magnetic recording,
a protective layer formed over said magnetic layer for protecting said magnetic layer, and
a lubricating layer formed over said protective layer,
wherein said protective layer is a layer composed substantially of carbon, hydrogen, and nitrogen and an atomic ratio (N/C) of nitrogen and carbon calculated from intensities of N1s and C1s spectra detected at a photoelectron detection angle of 7° by angularly resolved X-ray photoelectron spectroscopy is 0.15 or more and 0.25 or less,
wherein said protective layer comprises
a hydrogenated carbon protective film composed substantially of carbon and hydrogen and formed over said magnetic layer, and
a surface layer portion containing carbon and nitrogen and formed at a surface portion in contact with said lubricating layer,
said magnetic disk manufacturing method comprising:
forming said surface layer portion in a manner that differs from said protective film by being formed in an atmosphere with a vacuum degree higher than the vacuum degree in which said protective film is formed.