Electronic component and a method of manufacturing an electronic component
View Patent ↗An electronic component, notably one including, for example, a TFT, a storage capacitor, or a crossing between electrically conductive layers of a stack device is disclosed. The electronic component comprises a substrate whereon a first electrically conductive layer forming electrode is provided. A second electrode formed by a second electrically conductive layer is separated from the first electrode by at least a dielectric layer, comprising an interlayer of an electrically insulating material, preferably having high resistance against electrical breakdown and a further layer of a photo-patternable electrically insulating material.
1. An electronic component comprising a stack with a first electrically conductive layer and a second electrically conductive layer separated at least by a dielectric layer, wherein the dielectric layer comprises a further layer of a photo-patternable electrically insulating material and an interlayer of an electrically insulating material which is at least partially covered by the further layer, and wherein:
the photo-patternable electrically insulating material is an organic photoresist which has been processed by a developer solution, and
the interlayer is at least 20 nm thick and a solubility of the interlayer in the developer solution is less than a solubility of the photo-patternable electrically insulating material in the developer solution, the interlayer comprising more than one layer of organic material selected from the group consisting of polyimide, polynorbornene, polycarbonate, and polyparaxylylene, parylene, and/or inorganic material selected from the group consisting of SiOx, SiNx, AlOx, MN, AlOxNy HfOx, TiOx, BZT [Ba(ZrTi)O], BST [Ba(SrTi)O], and TaOx.
2. The electronic component according to claim 1 , wherein the interlayer comprises an inorganic material.
3. The electronic component according to claim 1 , wherein at least one of the first electrically conductive layer or the second electrically conductive layer comprises an organic material.
4. The electronic component according to claim 1 , further comprising a thin film transistor, a capacitor, or an element of a stack device and a crossing between the first electrically conductive layer and the second electrically conductive layer.
5. An electronic circuit comprising the electronic component according to claim 1 .
6. A flexible display comprising the electronic component according to claim 5 .