Humidity sensor based on progressive corrosion of exposed material
View Patent ↗A sensor senses a characteristic of an environment, e.g., humidity. The sensor has a substrate with strips of material that is sensitive to corrosion as a result of the characteristic. The strips are configured to respond differently to the characteristic. By means of repeatedly measuring the resistances of the strips, the environment can be monitored in terms of accumulated exposure to the characteristic. The strips are manufactured in a semiconductor technology so as to generate accurate sensors that behave predictably.
1. A device including a sensor for sensing a characteristic of an environment of the sensor, comprising:
a substrate;
at least two corrosive-sensitive strips disposed on the substrate, the corrosive-sensitive strips differing in metal-based material type and being sensitive to corrosion as a result of the characteristic, each of the at least two corrosive-sensitive strips being configured and arranged to corrode at different non-zero rates; and
at least two pairs of two contacts arranged between each of the at least two corrosive-sensitive strips and configured and arranged to measure an impedance of each strip, the impedance being indicative of the respective rates at which the strips corrode and thereby indicating the characteristic of the environment.
2. The device of claim 1 , further including:
at least one additional corrosive-sensitive strip arranged between two further contacts for measuring the impedance of the additional strip; and
wherein the at least one additional corrosive-sensitive strip is configured to have impedances that respond differently to the characteristic and is different in terms of thickness or material type.
3. The device of claim 2 , wherein:
a path length between the contacts of the corrosive-sensitive strip and a further path length between the further contacts of the additional corrosive-sensitive strip are substantially the same; and
the corrosive-sensitive strip and the additional corrosive-sensitive strip have different sizes of area exposed to the environment.
4. The device of claim 2 , wherein the material of the corrosive-sensitive strip and the material of the additional corrosive-sensitive strip are chemically the same.
5. The device of claim 2 , wherein the material of the corrosive-sensitive strip and the material of the additional corrosive-sensitive strip are chemically different.
6. The device of claim 2 , wherein the corrosive-sensitive strip and the additional corrosive-sensitive strip have different thicknesses as measured from the substrate to respective surfaces of the strip and of the additional strip exposed to the characteristic.
7. The device of claim 1 , wherein the characteristic includes humidity.
8. The device of claim 1 , wherein the corrosive-sensitive strip is configured so as to form a path between the two contacts that is longer than the shortest path between the contacts.
9. The device of claim 1 , wherein the corrosive-sensitive strip is configured so as to form a path between the two contacts that is the shortest path between the contacts.
10. The device of claim 1 , wherein the corrosive-sensitive strip is manufactured in a semiconductors technology process, wherein the at least two corrosive-sensitive strips are different in terms of thickness and material type.
11. The device of claim 1 , wherein the at least two corrosive-sensitive strips are interdigitized to form a comb-shaped structure.
12. The device of claim 1 , wherein the at least two corrosive-sensitive strips are arranged in meandering paths across the substrate.
13. The device of claim 1 , wherein the at least two corrosive-sensitive strips are arranged in a concentric pattern on the substrate.
14. A method of sensing a characteristic of an environment, the method comprising:
providing at least two corrosive-sensitive strips of material that differ in metal-based material type and are sensitive to corrosion at different non-zero rates as a result of the characteristic, wherein the strip is arranged between at least one pair of two contacts;
measuring an impedance of the least two corrosive-sensitive to indicate degradation due to corrosion; and
using the respective rates of corrosion to indicate the characteristic of the environment.
15. The method of claim 14 , comprising:
using an additional corrosive-sensitive strip sensitive to corrosion;
the at least two corrosive-sensitive strips and the additional corrosive-sensitive strip configured to have impedances that respond differently to the characteristic;
measuring the impedances of the corrosive-sensitive strip and the additional corrosive-sensitive strip on at least two different moments; and
comparing the respective impedance measurements with calibration or reference information, prepared in advance, to determine progress of corrosion.
16. The method of claim 14 , wherein the at least two corrosive-sensitive strips are different in terms of thickness and material type.
17. The method of claim 14 , wherein the at least two corrosive-sensitive strips are different in terms of thickness and material type.