Semiconductor device and its manufacturing method
View Patent ↗A technique capable of manufacturing a semiconductor device without posing contamination in a manufacturing apparatus regarding a phase change memory including a memory cell array formed of memory cells using a storage element (RE) by a variable resistor and a select transistor (CT). A buffer cell is arranged between a sense amplifier (SA) and a memory cell array (MCA) and between a word driver (WDB) and the memory cell array. The buffer cell is formed of the resistive storage element (RE) and the select transistor (CT) same as those of the memory cell. The resistive storage element in the memory cell is connected to a bit-line via a contact formed above the resistive storage element. Meanwhile, in the buffer cell, the contact is not formed above the resistive storage element, and a state of being covered with an insulator is kept upon processing the contact in the memory cell. By such a processing method, exposure and sublimation of a chalcogenide film used in the resistive storage element can be avoided.
1. A semiconductor device comprising:
a plurality of word lines;
a plurality of bit-lines intersecting the plurality of word lines;
a plurality of memory cells arranged at intersection points of the plurality of word lines and the plurality of bit-lines;
a block of word drivers for controlling the plurality of word lines;
a sense amplifier for discriminating read signals generated in the plurality of bit-lines;
a first voltage supply line arranged in parallel with the plurality of bit-lines;
a first plurality of buffer cells which are arranged at intersection points of the plurality of word lines and the first voltage supply line and are not connected to the first voltage supply line;
a second voltage supply line arranged in parallel with the plurality of word lines; and
a second plurality of buffer cells which are arranged at intersection points of the plurality of bit-lines and the second voltage supply line and are not connected to the plurality of bit-lines, wherein
the first plurality of buffer cells are arranged between the block of word drivers and the plurality of memory cells,
the second plurality of buffer cells are arranged between the sense amplifier and the plurality of memory cells, and
each of the plurality of memory cells includes a first resistive storage element and a first select transistor.
2. The semiconductor device according to claim 1 , wherein
the second voltage supply line is formed of a first metal layer,
the plurality of bit-lines and the first voltage supply line are formed of a second metal layer, respectively,
a first contact layer is formed below the first metal layer,
the first resistive storage element is formed below the first contact layer so as to be in contact with the first contact layer, and
the first and second pluralities of buffer cells include a second select transistor having the same shape as that of the first select transistor.
3. The semiconductor device according to claim 1 , wherein
the first and second pluralities of buffer cells further include a second resistive storage element having the same shape as that of the first resistive storage element, and
the second resistive storage element is covered with a first insulator and is not in contact with the first contact layer.
4. The semiconductor device according to claim 1 , wherein
the first resistive storage element includes a chalcogenide film.
5. The semiconductor device according to claim 3 , wherein
the first and second resistive storage elements include a chalcogenide film.
6. The semiconductor device according to claim 1 , wherein
each of the plurality of memory cells further includes a third select transistor, and
each of the first and second pluralities of buffer cells further include a fourth select transistor having the same shape as that of the third select transistor.
7. The semiconductor device according to claim 5 , wherein
the first resistive storage element includes a chalcogenide film.
8. The semiconductor device according to claim 6 , wherein
the first and third transistors are independently driven at a reset/set operation time so that a current flowing in the first resistive storage element is controlled.
9. The semiconductor device according to claim 1 , wherein
a second plurality of contact layers having the same shape as that of the first contact layer are formed between the first plurality of buffer cells and the block of word drivers, and
a third plurality of contact layers having the same shape as the first contact layer are formed between the second plurality of buffer cells and the sense amplifier.
10. The semiconductor device according to claim 3 , wherein
a second plurality of contact layers having the same shape as that of the first contact layer are formed between the first plurality of buffer cells and the block of word drivers, and
a third plurality of contact layers having the same shape as the first contact layer are formed between the second plurality of buffer cells and the sense amplifier.
11. The semiconductor device according to claim 10 , wherein
the first and second resistive storage elements include a chalcogenide film.
12. A method of manufacturing a semiconductor device having a memory cell including a select transistor and a resistive storage element, the method comprising the steps of:
forming the select transistor configuring the memory cell on a semiconductor substrate;
forming a first resistive storage element configuring the memory cell and a second resistive storage element configuring a buffer cell to be arranged around the memory cell;
forming a first insulator covering the first and second resistive storage elements;
forming a first contact layer in contact with the first resistive storage element and is not contact with the second resistive storage element within the first insulator;
forming a first metal layer configuring a second voltage supply line arranged in parallel with a word line; and
forming a second metal layer configuring a bit-line and a first voltage supply line arranged in parallel with the bit-line.