MEMS device and process
View Patent ↗A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
1. A MEMS transducer, comprising:
a substrate;
a membrane layer, supported by the substrate;
a back-plate layer, supported by the membrane layer, said back-plate layer comprising a respective sidewall portion and a respective raised portion; and
one or more columns separate from the respective sidewall portion of the back-plate layer, said columns connecting the back-plate layer, the membrane layer and the substrate.
2. A MEMS transducer as claimed in claim 1 , wherein said columns comprise the back-plate layer.
3. A MEMS transducer as claimed in claim 1 , wherein said membrane layer comprises a respective sidewall portion and a respective raised portion.
4. A MEMS transducer as claimed in claim 3 , wherein said columns comprise the membrane layer and the back-plate layer.
5. A MEMS transducer as claimed in claim 1 , wherein said columns have sloped walls.
6. A MEMS transducer as claimed in claim 1 , wherein said columns have stepped walls.
7. A MEMS transducer as claimed in claim 1 , wherein said columns are substantially circular.
8. A MEMS transducer as claimed in claim 1 , wherein said columns are formed around the periphery of the back-plate layer and the membrane layer.
9. A communications device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in claim 1 .
10. A portable telephone device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in claim 1 .
11. A portable telephone device as claimed in claim 10 , wherein the MEMS transducer is used in a noise-cancellation process.
12. An audio device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in claim 1 .
13. An audio device as claimed in claim 12 , wherein the MEMS transducer is used in a noise-cancellation process.
14. A computer device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in claim 1 .
15. A vehicle comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in- claim 1 .
16. A medical device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in any claim 1 .
17. An industrial device comprising a micro-electrical-mechanical system (MEMS) transducer as claimed in claim 1 .