IP Library Granted Patent US 8,372,726
Granted Patent B2
US 8,372,726 · App. 12/686,076 · Granted Feb 12, 2013

Methods and applications of non-planar imaging arrays

Inventors: Bassel de Graff (San Juan, TT); William J. Arora (Boston, MA); Gilman Callsen (Malden, MA); Roozbeh Ghaffari (Cambridge, MA)
Assignee: MC10, Inc.
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Quick Facts
Patent No.
US 8,372,726
App. No.
12/686,076
Granted
Feb 12, 2013
Kind
B2
Abstract

System, devices and methods are presented that provide an imaging array fabrication process method, comprising fabricating an array of semiconductor imaging elements, interconnecting the elements with stretchable interconnections, and transfer printing the array with a pre-strained elastomeric stamp to a secondary non-planar surface.

Claims (53)

1. An imaging array fabrication process method, comprising:

fabricating an array of semiconductor imaging islands from a single-crystal semiconductor substrate;

interconnecting the imaging islands with stretchable interconnections; and

disposing at least one micro-lens over at least a portion of at least one semiconductor imaging island of the array of one semiconductor imaging islands.

2. An imaging array fabrication process method, comprising:

fabricating an array of semiconductor imaging elements;

interconnecting the elements with stretchable interconnections;

disposing at least one micro-lens over at least a portion of at least one semiconductor imaging element of the array of one semiconductor imaging elements; and

transfer printing the array with a pre-strained elastomeric stamp to a secondary non-planar surface.

3. The method of claim 2 , wherein the semiconductor is a single-crystalline semiconductor.

4. The method of claim 2 , wherein the semiconductor is a non-single crystal silicon material used for photo-detection.

5. The method of claim 4 , wherein the material is amorphous silicon material.

6. The method of claim 4 , wherein the material is polycrystalline silicon material.

7. The method of claim 4 , wherein the material is single-crystal silicon material.

8. The method of claim 4 , wherein the material is conductive oxide material.

9. The method of claim 4 , wherein the material is organic material.

10. The method of claim 4 , wherein the material is carbon nano-tube material.

11. The method of claim 2 , wherein the semiconductor imaging elements include at least one imaging pixel and support electronics for controlling and reading out the image from the at least one imaging pixel.

12. The method of claim 2 , wherein light impinges the front-side of the semiconductor imaging elements.

13. The method of claim 2 , wherein light impinges the back-side of the semiconductor imaging elements.

14. The method of claim 13 , wherein the semiconductor imaging elements have at least one of color filters and the at least one micro-lens transfer printed onto the backside of the semiconductor imaging elements.

15. The method of claim 2 , wherein the surface is actuated through an applied force.

16. The method of claim 15 , wherein the actuated surface changes the curvature of the surface.

17. The method of claim 2 , further comprising a curved imaging system imager packaging in which the non-planar surface in mounted.

18. The method of claim 17 , wherein the packaging is a chip scale packaging.

19. The method of claim 17 , wherein the packaging is a ball grid array.

20. The method of claim 2 , wherein the of fabricating the array of semiconductor imaging elements is on at least one of a silicon-on-insulator (S 01 ) and a rigid stack.

21. The method of claim 20 , wherein the fabrication structure is a layered order of Silicon, then Polymethyl Methacrylate (PMMA), then polyimide (PI), and then Silicon.

22. The method of claim 2 , wherein the semiconductor imaging elements include color filters.

23. The method of claim 22 , wherein the color filters provide for color image capabilities.

24. The method of claim 2 , wherein the at least one micro-lens provides for enhanced image quality.

25. The method of claim 2 , wherein the semiconductor imaging elements are arranged as sensor islands.

26. The method of claim 25 , wherein the sensor islands are comprised of one pixel per sensor island.

27. The method of claim 25 , wherein the sensor islands are comprised of more than one pixel per sensor island.

28. The method of claim 25 , wherein the sensor islands include support electronics.

29. The method of claim 2 , wherein the imaging array is shaped in symmetrical nonplanar geometry.

30. The method of claim 29 , wherein the geometry is a paraboloid of revolution.

31. The method of claim 29 , wherein the geometry is a hemisphere.

32. The method of claim 29 , wherein the geometry is an ellipsoid.

33. The method of claim 2 , wherein the imaging array is used to create a camera module.

34. The method of claim 33 , wherein the camera module includes a lens barrel with at least one lens on a moveable mount, and a circuit for image processing and transmission.

35. The method of claim 33 , wherein the camera module includes a lens.

36. The method of claim 35 , wherein the lens is a plastic molded lens.

37. The method of claim 35 , wherein the lens shape is changed via the application of a force.

38. The method of claim 37 , wherein the force is a radial tension force.

39. The method of claim 37 , wherein the force is a radial compression force.

40. The method of claim 2 , wherein the imaging array is included in a security imager.

41. The method of claim 2 , wherein the imaging array is included in an inspection Imager.

42. The method of claim 2 , wherein the imaging array is included in a metrology imager.

43. The method of claim 2 , wherein the imaging array is included in a space-based Imager.

44. The method of claim 2 , wherein the imaging array is included in a manned vehicle.

45. The method of claim 2 , wherein the imaging array is included in an unmanned vehicle.

46. The method of claim 2 , wherein the imaging array is included in an endoscopic Imager.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 18, 2020
From: BRAEMAR ENERGY VENTURES III, L.P.; NORTH BRIDGE VENTURE PARTNERS VI, L.P.; NORTH BRIDGE VENTURE PARTNERS 7, L.P.; ABERDARE VENTURES IV, LP; ABERDARE PARTNERS IV, LP; WINDHAM LIFE SCIENCES PARTNERS, LP; WINDHAM-MC INVESTMENT I, LLC; LABORATORY CORPORATION OF AMERICA HOLDINGS
To: MC10, INC.
Reel/Frame 054456/0903 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2020
From: MC10, INC.
To: MEDIDATA SOLUTIONS, INC.
Reel/Frame 054476/0075 →
SECURITY INTEREST Recorded Apr 2, 2020
From: MC10, INC.
To: BRAEMAR ENERGY VENTURES III, L.P.; NORTH BRIDGE VENTURE PARTNERS VI, L.P.; NORTH BRIDGE VENTURE PARTNERS 7, L.P.; ABERDARE VENTURES IV, LP; ABERDARE PARTNERS IV, LP; WINDHAM LIFE SCIENCES PARTNERS, LP; WINDHAM-MC INVESTMENT I, LLC; LABORATORY CORPORATION OF AMERICA HOLDINGS
Reel/Frame 052296/0969 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2010
From: GRAFF, BASSEL DE; ARORA, WILLIAM J.; CALLSEN, GILMAN; GHAFFARI, ROOZBEH
To: MC10, INC.
Reel/Frame 024412/0357 →
Continuity (12)
Continuation In Part 12636071 · Dec 11, 2009
Continuation In Part 12616922 · Nov 12, 2009
Continuation In Part 12575008 · Oct 7, 2009
Provisional Application 61144149 · Jan 12, 2009
Provisional Application 61156906 · Mar 3, 2009
Provisional Application 61121568 · Dec 11, 2008
Provisional Application 61121541 · Dec 11, 2008
Provisional Application 61140169 · Dec 23, 2008
Provisional Application 61113622 · Nov 12, 2008
Provisional Application 61103361 · Oct 7, 2008
Provisional Application 61113007 · Nov 10, 2008
Related Publication 20100178722A1 · Jul 15, 2010