Method and system for double-sided patterning of substrates
View Patent ↗A system of patterning first and second opposed sides of a substrate is described. The system may employ a mold assembly and obtaining a desired spatial relationship between the first and second opposed sides of the substrate and the mold assembly. In a further embodiment, the method and system may employ a first and a second mold assembly.
1. A system for patterning a substrate having first and second opposed sides, the system comprising:
a substrate chuck coupled to the substrate, the substrate chuck having a first surface, the first surface having a cavity formed therein, wherein the cavity is constructed to isolate patterned layers formed on the substrate;
a mold assembly; and
a robot coupled to the substrate to alternatively place the substrate in first and second positions with respect to the mold assembly such that at a first position a first surface of the mold assembly contacts a material positioned on the first opposed side of the substrate, and subsequently at a second position the first surface of the mold assembly contacts a material positioned on the second opposed side of the substrate.
2. The system as recited in claim 1 , further including first and second opposed fluid dispensers, the first fluid dispenser positioning the material on the first side of the substrate and the second fluid dispenser positioning the material on the second side of the substrate.
3. The system as recited in claim 1 , further including an optical detection system to determine a spatial relationship between the mold assembly and the substrate.
4. The system as recited in claim 1 , wherein the robot further flips the substrate 180 degrees with respect to the mold assembly.
5. The system as recited in claim 1 , wherein the robot includes an arm coupled to a driving means, wherein the arm has an end effecter coupled to the substrate.
6. The system as recited in claim 5 , wherein the end effecter contacts the substrates without contacting an area of the substrate having polymeric material positioned thereon.
7. The system as recited in claim 5 , wherein the driving means provides motion about a first and a second axes.
8. The system as recited in claim 7 , wherein the driving means provides rotation about an x axes to flip the substrate substantially 180degrees with respect to the mold assembly.