Semiconductor device and manufacturing method therefor
View Patent ↗The reliability of a semiconductor device is prevented from being reduced. A planar shape of a sealing body is comprised of a quadrangle having a pair of first sides, and a pair of second sides crossing with the first sides. Further, it has a die pad, a controller chip (first semiconductor chip) and a sensor chip (second semiconductor chip) mounted over the die pad, and a plurality of leads arranged along the first sides of the sealing body. The controller chip and the leads are electrically coupled to each other via wires (first wires), and the sensor chip and the controller chip are electrically coupled to each other via wires (second wires). Herein, the die pad is supported by a plurality of suspending leads formed integrally with the die pad and extending from the die pad toward the first sides of the sealing body. Each of the suspending leads has an offset part.
1. A semiconductor device comprising:
a sealing body having a planar shape comprised of a quadrangle including a pair of first sides, and a pair of second sides crossing with the first sides;
a die pad;
a plurality of suspending leads formed integrally with the die pad and extending from the die pad toward the first side of the sealing body;
a plurality of leads arranged around the die pad, and arranged along the first sides of the sealing body;
a first semiconductor chip having a first main surface, a plurality of first electrode pads formed on the first main surface, and a first back surface opposed to the first main surface, and mounted over the die pad;
a second semiconductor chip having a second main surface, a plurality of second electrode pads formed on the second main surface, and a second back surface opposed to the second main surface, and mounted over the die pad;
a plurality of first wires for electrically coupling the leads and the first electrode pads of the first semiconductor chip, respectively; and
a plurality of second wires for electrically coupling the first electrode pads of the first semiconductor chip and the second electrode pads of the second semiconductor chip, respectively,
wherein the die pad, the suspending leads, the leads, the first semiconductor chip, the second semiconductor chip, the first wires, and the second wires are covered with the sealing body; and
wherein each of the suspending leads has an offset part.
2. The semiconductor device according to claim 1 , wherein a thickness of the second semiconductor chip is larger than that of the first semiconductor chip.
3. The semiconductor device according to claim 2 , wherein the second semiconductor chip is a sensor chip having a hollow part formed between the second main surface and the second back surface, and a movable part arranged inside of the hollow part.
4. The semiconductor device according to claim 3 , wherein the area of an upper surface of the die pad is smaller than the total area of the first back surface of the first semiconductor chip and the second back surface of the second semiconductor chip.
5. The semiconductor device according to claim 3 ,
wherein a silicon chip having an upper surface larger in area than the second back surface of the second semiconductor chip is arranged between the second semiconductor chip and the die pad; and
wherein the second back surface of the second semiconductor chip is bonded to the silicon chip such that the second back surface of the semiconductor chip is entirely covered with the silicon chip.
6. The semiconductor device according to claim 5 ,
wherein in the leads, a metal layer is formed over the surface of each region exposed from the sealing body; and
wherein the leads, the suspending leads, and the die pad are comprised of Cu (copper).
7. The semiconductor device according to claim 6 , wherein the first back surface of the first semiconductor chip is also bonded to an upper surface of the silicon chip.
8. The semiconductor device according to claim 7 ,
wherein the silicon chip is bonded to the die pad, and the suspending leads; and
wherein the upper surface of the die pad is covered with the lower surface of the silicon chip.
9. The semiconductor device according to claim 1 ,
wherein the offset part has a tilt portion, and bent portions located on both sides of the tilt portion; and
wherein the tilt angle of the tilt portion with respect to an upper surface of the die pad is 45 degrees or less.
10. The semiconductor device according to claim 1 , wherein the first semiconductor chip is arranged at the middle of the semiconductor device in plan view.
11. The semiconductor device according to claim 10 , wherein the number of the leads arranged lateral to the second semiconductor chip is smaller than that of the leads arranged lateral to the first semiconductor chip.
12. The semiconductor device according to claim 1 ,
wherein the die pad is formed integrally with a plurality of first suspending leads extending along a first direction which is directed toward the first side of the sealing body, and a second suspending lead extending along a second direction crossing with the first direction; and
wherein the offset part is formed in the first suspending leads, and is not formed in the second suspending lead.