Metal substrate having electronic devices formed thereon
View Patent ↗A method of forming an electronic device on a metal substrate deposits a first seed layer of a first metal on at least one master surface with a roughness less than 400 nm. A supporting metal layer is bonded to the first seed layer to form the metal substrate 10 . The metal substrate is removed from the master surface, and at least one electronic device is formed on the seed layer of the metal substrate.
1. A method of forming a semiconductor device on a metal substrate comprising:
providing a master having a master surface with a roughness of less than 400 nm, peak-to-peak;
depositing a first seed layer of a first metal on the master surface of the master to form a substantially planar surface of the first seed layer proximate the master surface;
bonding a supporting metal layer to the first seed layer on a surface opposite the substantially planar surface, the seed layer and the metal layer comprising the metal substrate;
removing the metal substrate from the master to expose the substantially planar surface;
forming at least one semiconductor device on the exposed substantially planar surface, such that the first seed layer is not disposed between the at least one semiconductor and the exposed substantially planar surface;
applying a patterning layer to said semiconductor device; and
forming a pattern in said patterning layer.
2. The method of claim 1 wherein forming a pattern comprises embossing.
3. The method of claim 1 wherein the pattern comprises one or more lens elements.
4. The method of claim 1 wherein the one or more lens elements are spatially aligned with the semiconductor devices formed on said surface.
5. The method of claim 1 , wherein the semiconductor device is a thin film transistor.
6. A method as in claim 1 comprising the additional step of: depositing a second seed layer of a second metal on the first seed layer.
7. The method as in claim 1 wherein the first metal is chrome.
8. The method of claim 1 wherein said semiconductor device comprises one or more thin film transistors.
9. The method as in claim 1 wherein said supporting metal layer is a nickel sulfate or a nickel compound.
10. The method as in claim 1 wherein said supporting metal layer is bonded by electroplating.
11. The method as in claim 1 wherein said supporting metal layer is bonded by plasma deposition.
12. The method as in claim 1 wherein said supporting metal layer is stainless steel.
13. The method as in claim 1 wherein removing said metal substrate comprises applying heat.
14. The method of claim 1 wherein the step of forming at least one semiconductor device further comprises spin coating a thin-film semiconductor material onto the exposed substantially planar surface.
15. The method of claim 1 further comprising depositing a dielectric material onto the exposed substantially planar surface prior to forming said at least one semiconductor device.
16. The method of claim 1 further comprising attaching the substrate with said at least one semiconductor device onto another device.
17. The method of claim 1 further comprising attaching the substrate with said at least one semiconductor device onto a rigid support.
18. The method of claim 1 further comprising coupling the semiconductor with a liquid crystal pixel.
19. The method of claim 1 further comprising coupling the semiconductor device with a light-emitting diode pixel.
20. The method of claim 1 further comprising coupling the semiconductor device with an organic light-emitting diode pixel.