Pressure sensor
View Patent ↗A pressure sensor includes: a housing having openings at both ends thereof; a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing; a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel; the one of the base portions is a first fixed portion, a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of second fixed portions arranged at positions in symmetry with respect to the first fixed portion, the first fixed portion is fixedly supported by the force transmission device, and the second fixed portions are supported and fixed to portions where a line connecting the first fixed portion and the pair of second fixed portions intersect the housing.
1. A pressure sensor comprising:
a housing having openings at both ends thereof;
a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing;
a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and
a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein
a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel;
the one of the base portions is a first fixed portion,
a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of second fixed portions arranged at positions in symmetry with respect to the first fixed portion,
the first fixed portion is fixedly supported by the force transmission device, and
the second fixed portions are supported and fixed to portions where a line connecting the first fixed portion and the pair of second fixed portions intersect the housing.
2. The pressure sensor according to claim 1 , wherein at least one of the pair of pressure-receiving devices is a bellows expanding inward of the housing, and a pressure-receiving portion of the bellows and the force transmission device are connected.
3. The pressure sensor according to claim 1 , wherein the pair of pressure-receiving devices are second bellows expanding outward of the housing, and pressure-receiving portions of the second bellows and the force transmission device are connected.
4. The pressure sensor according to claim 1 , wherein the force transmission device is held by a cantilever being fixed at one end to the housing and at the other end on the opposite side from the one end to the force transmission device, and being capable of bending in the direction of displacement of the force transmission device.
5. The pressure sensor according to claim 1 , wherein the pressure-sensitive element includes the base portions provided at both end portions thereof, and an oscillating portion between the base portions provided at the both end portions.
6. The pressure sensor according to claim 1 , wherein connecting devices are formed in symmetry in pair with the intermediary of the pressure-sensitive element.
7. The pressure sensor according to claim 1 , wherein one end of the pressure-sensitive element and the connecting devices are connected by reinforcing portions.