Solid-state image pickup device and a method of manufacturing the same
View Patent ↗A solid-state image pickup device includes: a silicon layer; a pixel portion formed in the silicon layer for processing and outputting signal charges obtained by carrying out photoelectric conversion for incident lights; an alignment mark formed in a periphery of the pixel portion and in the silicon layer; and a contact portion through which a first electrode within a wiring layer formed on a first surface of the silicon layer, and a second electrode formed on a second surface opposite to the first surface of the silicon layer through an insulating film are connected, wherein the alignment mark and the contact portion are formed from conductive layers made of the same conductive material and formed within respective holes each extending completely through the silicon layer through respective insulating layers made of the same material.
1. A method of manufacturing a solid-state image pickup device, comprising:
forming a first hole in which an alignment mark is to be formed, and a second hole in which a contact portion for a pad is to be formed;
filling a conductive material in each of said first hole and said second hole with an insulating material between the conductive material and the silicon substrate, thereby forming said alignment mark and said contact portion in said first hole and said second hole, respectively;
forming a light converting portion, in a pixel portion, for photoelectrically converting an incident light to output signal charges corresponding to the incident light, a transistor, in said pixel portion, for reading out the signal charges from said light receiving portion and outputting a signal corresponding to the signal charges, and a transistor, in a peripheral circuit portion, for processing the signal output from said pixel portion in said silicon substrate;
forming a first insulating film on said first surface of the silicon substrate, and forming a connection electrode so as to be connected to said contact portion on said first insulating film;
forming a wiring layer so as to include a first electrode, in a pad portion, connected to said connection electrode on said first insulating film;
removing a second surface side opposite to the first surface side of said silicon substrate until said contact portion is exposed, and forming a second insulating film on an exposed surface of the remaining silicon substrate; and
forming a second electrode, in said pad portion, so as to be connected to said conductive layer in said second insulating film on the second surface side of said silicon substrate.
2. The method of manufacturing a solid-state image pickup device according to claim 1 , wherein
a silicide layer is formed on each of source and drain regions of said transistor in said peripheral circuit portion and at a same time, a silicide layer is formed on a surface of said conductive layer.
3. The method of manufacturing a solid-state image pickup device according to claim 1 , further comprising:
forming a color filter layer at an optical path of the incident light made incident to said light receiving portion and on said second insulating film; and
forming a condenser lens for guiding the incident light to said light receiving portion on said color filter layer.