Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors
View Patent ↗A method of manufacture of CIGS photovoltaic cells and modules involves sequential deposition of copper indium gallium diselenide compounds in multiple thin sublayers to form a composite CIGS absorber layer of a desirable thickness greater than the thickness of each sublayer. In an embodiment, the method is adapted to roll-to-roll processing of CIGS PV cells. In an embodiment, the method is adapted to preparation of a CIGS absorber layer having graded composition through the layer. In a particular embodiment, the graded composition is enriched in copper at a base of the layer. In an embodiment, each CIGS sublayer is deposited by co-evaporation of copper, indium, gallium, and selenium which react in-situ to form CIGS.
1. A system for forming a solar absorber layer of a thin-film photovoltaic cell, the system comprising at least a first and second individual deposition zone, each of the first and second individual deposition zones including
a source device configured to deposit a material selected from the group consisting of Copper Indium DiSelenide and an alloy of Copper Indium DiSelenide; and
a reacting subsystem configured to individually react the deposited material to form a p-type semiconductor solar absorber sublayer capable of generating electron-hole pairs in response to photons of electromagnetic energy incident thereon.
2. The system of claim 1 , the system further comprising:
a vacuum pump; and
wherein the deposited material is an alloy of Copper Indium DiSelenide further including Gallium; and
wherein each deposition zone comprises further includes a heater and sources for copper, indium, and gallium vapors.
3. The system of claim 2 further comprising a feed spool, a takeup spool, and substrate handling apparatus for passing a flexible substrate from the feed spool, through each of the first and second individual deposition zones, and onto the takeup spool.
4. The system of claim 1 , each solar absorber sublayer having a same composition.
5. The system of claim 1 , a first solar absorber sublayer having a first composition, a second solar absorber sublayer having a second composition, the first composition differing from the second composition, whereby the solar absorber layer has a composition that is graded in at least one element concentration from the first solar absorber sublayer to the second solar absorber sublayer.
6. The system of claim 5 , a third solar absorber sublayer having a third composition, the third composition differing from the first and second compositions, whereby the solar absorber layer has a composition that is graded in at least one element concentration from the first solar absorber sublayer to the second solar absorber sublayer to the third solar absorber sublayer.
7. The system of claim 1 , each solar absorber sublayer having a same thickness.
8. The system of claim 1 , at least two solar absorber sublayers having a different thicknesses.