Light-emitting element and light-emitting element fabrication method
View Patent ↗According to an aspect of the invention, a light-emitting element includes a semiconductor layer, a gold electrode layer, an insulator, a barrier metal layer, and an aluminum wiring layer. The gold electrode layer is formed on a part of the semiconductor layer and is electrically connected to the semiconductor layer. The gold electrode layer being made of metal including gold. The insulator film covers the semiconductor layer and has a contact opening corresponding to the gold electrode layer. The barrier metal layer covers a an upper face of the gold electrode layer and the insulator film in a vicinity of the contact opening. The aluminum wiring layer is formed on the barrier metal layer and electrically connected to the barrier metal layer.
1. A light-emitting element comprising:
a semiconductor layer;
a gold electrode layer that is formed on a part of the semiconductor layer and electrically connected to the semiconductor layer, the gold electrode layer being made of metal including gold;
an insulator film that covers the semiconductor layer and has a contact opening corresponding to the gold electrode layer;
a barrier metal layer that covers an upper face of the gold electrode layer and the insulator film in a vicinity of the contact opening; and
an aluminum wiring layer that is formed on the barrier metal layer and electrically connected to the barrier metal layer, that extends on the insulator film in a direction departing from the vicinity, and that is made of metal including aluminum,
wherein a lower surface of the aluminum wiring layer is in contact with the barrier metal pattern in the contact opening and in the vicinity of the contact opening, and extends in the direction in a state of contacting with the insulator film.
2. A fabrication method for a light-emitting element, the fabrication method comprising:
forming an insulator film on a semiconductor layer on which a gold electrode layer is formed, the gold electrode layer being made of metal including gold;
forming a contact opening in the insulator film so as to expose the gold electrode layer;
forming a barrier metal layer that covers an upper face of the gold electrode layer and the insulator film in a vicinity of the contact opening; and
forming an aluminum wiring layer that extends from a face of the barrier metal layer to and along a face of the insulator film in a direction departing from the vicinity so as to be electrically connected to the barrier metal layer and that is made of metal including aluminum,
wherein a lower surface of the aluminum wiring layer is in contact with the barrier metal pattern in the contact opening and in the vicinity of the contact opening, and extends in the direction in a state of contacting with the insulator film.
3. The method according to claim 2 , wherein the forming step of the barrier metal layer includes performing wet etching on the barrier metal layer.
4. The light-emitting element according to claim 1 , wherein a shape of the barrier metal layer is formed by wet etching.
5. The method according to claim 2 , wherein the gold electrode layer is disposed between the semiconductor layer and the insulator film after the forming step of the insulator film.