Elastic boundary wave device
View Patent ↗An elastic boundary wave device of the present invention includes a plurality of elastic boundary wave elements. The elastic boundary wave elements each include a piezoelectric material layer, an electrode disposed over the piezoelectric material layer, a first dielectric layer formed over the piezoelectric material layer so as to cover the electrode, and a second dielectric layer formed over the first dielectric layer. An acoustic velocity of the second dielectric layers is faster than an acoustic velocity of the first dielectric layers, and the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the plurality of elastic boundary wave elements is different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements. This enables improving the degree of suppression in use as a filter in the elastic boundary wave device.
1. An elastic boundary wave device comprising a plurality of elastic boundary wave elements,
the elastic boundary wave elements each comprising a piezoelectric material layer, an electrode disposed over the piezoelectric material layer, a first dielectric layer formed over the piezoelectric material layer so as to cover the electrode, and a second dielectric layer formed over the first dielectric layer,
an acoustic velocity of the second dielectric layers being faster than an acoustic velocity of the first dielectric layers, and
the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the plurality of elastic boundary wave elements being different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements.
2. The elastic boundary wave device according to claim 1 , wherein the plurality of elastic boundary wave elements are connected in series and in parallel.
3. The elastic boundary wave device according to claim 2 , wherein the elastic boundary wave elements are each a 1 terminal pair resonator.
4. The elastic boundary wave device according to claim 2 , wherein the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the elastic boundary wave elements connected in parallel is different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements.
5. The elastic boundary wave device according to claim 2 , wherein the acoustic velocity of at least one second dielectric layer from among the elastic boundary wave elements connected in series, and the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the elastic boundary wave elements connected in parallel are different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements.
6. The elastic boundary wave device according to claim 2 , wherein the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the elastic boundary wave elements connected in series is different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements.
7. The elastic boundary wave device according to claim 1 , wherein the piezoelectric material layers have each been formed from LiNbO 3 or LiTaO 3 .
8. The elastic boundary wave device according to claim 1 , wherein the first dielectric layers include SiO 2 as a main component.
9. The elastic boundary wave device according to claim 1 , wherein the second dielectric layers include, as a main component, any one selected from the group consisting of alumina, SiN, SiC, and diamond-like carbon.
10. The elastic boundary wave device according to claim 1 , wherein a formation method for the second dielectric layer of at least one elastic boundary wave element from among the plurality of elastic boundary wave elements is different from a formation method for the second dielectric layer of another of the elastic boundary wave elements.