Vibrating element and vibrator
View Patent ↗A vibrating element includes: a vibrating body having frequency temperature dependency; and a temperature characteristic correcting part provided on a surface of the vibrating body. The temperature characteristic correcting part has a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and is expressed by a temperature characteristic curve which has at least one of an inflection point and an extremal value. In the vibrating element, a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body.
1. A vibrating element, comprising:
a vibrating body having frequency temperature dependency; and
a temperature characteristic correcting part provided on a surface of the vibrating body, the temperature characteristic correcting part having a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and being expressed by a temperature characteristic curve, the temperature characteristic curve having at least one of an inflection point and an extremal value, wherein
a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body, and
the vibrating body includes two kinds of the temperature characteristic correcting parts that have different temperatures of at least one of the inflection point and the extremal value from each other.
2. The vibrating element according to claim 1 , wherein the temperature of at least one of the inflection point and the extremal value is a Neel temperature.
3. The vibrating element according to claim 1 , wherein the temperature characteristic correcting part is made of one of Cr and a Cr alloy.
4. The vibrating element according to claim 1 , wherein the temperature difference is generated by a difference of thickness of metal films constituting the temperature correcting parts.
5. The vibrating element according to claim 1 , wherein the temperature characteristic correcting parts are made of one of an alloy and a metal mainly contained in the alloy, and
the temperature difference is generated by one of difference between a content rate of mainly-contained metal of the alloy and a content rate of other metal and difference between a thickness of the alloy and a thickness of the mainly contained metal of the alloy.
6. The vibrating element according to claim 1 , wherein a main vibration of the vibrating body is a flexural vibration.
7. The vibrating element according to claim 1 , wherein a main vibration of the vibrating body is a contour vibration.
8. The vibrating element according to claim 1 , wherein an insulation film is interposed between the vibrating body and the temperature characteristic correcting part.
9. A vibrator, comprising: the vibrating element according to claim 1 and a package in which the vibrating element is mounted.
10. A vibrating element, comprising:
a vibrating body having frequency temperature dependency: and
a temperature characteristic correcting part provided on a surface of the vibrating body, the temperature characteristic correcting part having a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and being expressed by a temperature characteristic curve, the temperature characteristic curve having at least one of an inflection point and an extremal value, wherein
a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body, and
one vibrating body is bonded to an upper surface of the temperature characteristic correcting part formed on a surface of the other vibrating body so as to sandwich the temperature characteristic correcting part by two pieces of temperature characteristic correcting parts.