Thermal humidity sensor
View Patent ↗A measurement element includes a semiconductor substrate with electrical insulating film formed thereon. A resistor formed on the electrical insulating film constitutes a heater; and a cavity is formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in the thickness direction. The measurement element has a film formed covering the region of the opening or slit.
1. A measurement element comprising:
a semiconductor substrate;
an electrical insulating film formed on the semiconductor substrate;
a resistor formed on the electrical insulating film, the resistor constituting a heater; and
a cavity part formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed, wherein
the region where the body part of the resistor is formed is formed into a thin wall part by the cavity part,
any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof, and
a film is formed covering a region of the opening or the slit.
2. The measurement element according to claim 1 , wherein
the electrical insulating film is formed on a top surface of the semiconductor substrate, and
the cavity part is formed from a back surface toward the top surface of the semiconductor substrate.
3. The measurement element according to claim 1 , wherein
the film covering the region of the opening or the slit is an organic film.
4. The measurement element according to claim 3 , wherein
the organic film is made of polyimide.
5. The measurement element according to claim 1 , wherein
the film covering the region of the opening or the slit is formed as an electric insulating film thinner than the electrical insulating film constituting the thin wall part on which the body part of the resistor is formed.
6. The measurement element according to claim 1 , wherein
a rim of the opening or the slit is located inward of a rim of the cavity part.
7. A measurement element comprising:
a semiconductor substrate;
an electrical insulating film formed on the semiconductor substrate;
a resistor formed on the electrical insulating film, the resistor constituting a heater; and
a cavity part formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed, wherein
the region where the body part of the resistor is formed is formed into a thin wall part by the cavity part,
any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof,
before forming the cavity part, the electrical insulating film is formed on a top surface of the semiconductor substrate, and an organic film is formed on the electrical insulating film,
after forming the electrical insulating film and the organic film, the cavity part is formed from a back surface toward the top surface of the semiconductor substrate, and
the opening or the slit is formed in the electrical insulating film constituting the thin wall part, from a side where the cavity part is formed, while leaving the organic film unremoved.