Optical device
A multiwavelength optical device includes a substrate; a first mirror section including a plurality of first mirror layers stacked on the substrate; an active layer stacked on the first mirror section, the active layer including a light emission portion; a second mirror section including a plurality of second mirror layers stacked on the active layer; a first electrode disposed between the active layer and the second mirror section; and a second electrode disposed between the first mirror section and the active layer.
1. An optical device comprising:
a substrate;
a first mirror section including a plurality of first mirror layers stacked on the substrate;
an active layer stacked on the first mirror section, the active layer including a light emission portion;
a second mirror section including a plurality of second mirror layers stacked on the active layer;
a first spacer layer provided between the first mirror section and the active layer;
a second spacer layer provided between the second mirror section and the active layer;
a first electrode having at least one portion disposed at a lower stack than the second mirror section and contacting with the second spacer layer;
a second electrode having at least one portion disposed above the first mirror section and contacting with the first spacer layer; and
an insulating groove section configured to penetrate the second mirror section, the second spacer layer and the active layer,
wherein the first electrode is disposed in a first hole provided inside the insulating groove section, the first hole extending to a boundary between the active layer and the second spacer laver, and
the second electrode is disposed in a second hole provided outside the insulating groove section, the second hole extending to a boundary between the first spacer layer and the active layer.
2. The optical device according to claim 1 , wherein the at least one portion of the first electrode is disposed above the active layer.
3. The optical device according to claim 1 , wherein the at least one portion of the second electrode is disposed at a lower stack than the active layer.
4. The optical device according to claim 1 , wherein the first mirror section and the second mirror section are not provided between the first electrode and the second electrode.
5. The optical device according to claim 1 , wherein the first electrode is disposed on a step portion of the second spacer layer, and the second electrode is disposed on a step portion of the first spacer layer.
6. The optical device according to claim 1 , further comprising a pair of aperture layers each having a single aperture and interposing the active layer therebetween,
wherein light is emitted through the single aperture.
7. The optical device according to claim 1 , wherein
the first mirror layers include at least a first inner mirror layer and a first outer mirror layer stacked above the first inner mirror layer,
the second mirror layers include at least a second inner mirror layer and a second outer mirror layer stacked below the second inner mirror layer,
the first inner mirror layer and the second inner mirror layer resonate a first wavelength component of a light emitted from the active layer, and
the first outer mirror layer and the second outer mirror layer resonate a second wavelength component of the light emitted from the active layer, the second wavelength component being different from the first wavelength component.
8. The optical device according to claim 1 , wherein
the plurality of first mirror layers include a first mirror layer, a second mirror layer and a third spacer layer between the first mirror layer and the second mirror layer,
the plurality of second mirror layers include a third mirror layer, a fourth mirror layer and a fourth spacer layer between the third mirror layer and the fourth mirror layer,
the first mirror layer, the second mirror layer, the third mirror layer and the fourth mirror layer respectively include a plurality of layers, each of which is made of a semiconductor material having content different from each other,
a thicknesses of the first mirror layer and the third mirror layer are set to make a first optical resonator between the first mirror layer and the third mirror layer with respect to a first wavelength, and
a thicknesses of the second mirror layer and the fourth mirror layer are set to make a second optical resonator between the second and fourth mirror layer with respect to a second wavelength.
9. An optical device comprising:
a substrate;
a first mirror section including a plurality of first mirror layers stacked on the substrate;
an active layer stacked on the first mirror section, the active layer including a light emission portion;
a second mirror section including a plurality of second mirror layers stacked on the active layer;
a first spacer layer provided between the first mirror section and the active layer;
a second spacer layer provided between the second mirror section and the active layer;
a first electrode having at least one portion disposed at a lower stack than the second mirror section and contacting with the second spacer layer;
a second electrode having at least one portion disposed above the first mirror section and contacting with the first spacer layer;
a protective section configured to cover the first and second electrodes; and
a connecting electrode including a via extending through the protective section and a surface electrode disposed on the protective section,
wherein one end of the via is connected to one of the first electrode and the second electrode, and
the other end of the via is connected to the surface electrode.
10. The optical device according to claim 9 , wherein the surface electrode is formed by plating.
11. The optical device according to claim 9 , wherein
the plurality of first mirror layers include a first mirror layer, a second mirror layer and a third spacer layer between the first mirror layer and the second mirror layer,
the plurality of second mirror layers include a third mirror layer, a fourth mirror layer and a fourth spacer layer between the third mirror layer and the fourth mirror layer,
the first mirror layer, the second mirror layer, the third mirror layer and the fourth mirror layer respectively include a plurality of layers, each of which is made of a semiconductor material having content different from each other,
a thicknesses of the first mirror layer and the third mirror layer are set to make a first optical resonator between the first mirror layer and the third mirror layer with respect to a first wavelength, and
a thicknesses of the second mirror layer and the fourth mirror layer are set to make a second optical resonator between the second and fourth mirror layer with respect to a second wavelength.