Superabrasive Tool Having Surface Modified Superabrasive Particles and Associated Methods
Superabrasive tools and associated methods of making and using are provided. In one aspect, for example, a superabrasive tool having improved superabrasive particle retention is provided. Such a tool can include a matrix layer and a plurality of superabrasive particles held in and protruding from the matrix layer, whereby surfaces of the plurality of superabrasive particles contacting the matrix layer have been roughened to have an RA of greater than about 1 micron, and wherein the roughened surfaces improve the retention of the plurality of superabrasive particles in the matrix layer.
1 . A superabrasive tool, comprising:
a matrix layer; and
a plurality of superabrasive particles held in and protruding from the matrix layer,
whereby surfaces of the plurality of superabrasive particles contacting the matrix layer have been roughened to have an RA of greater than about 1 micron.
2 . The superabrasive tool of claim 1 , wherein the roughened surfaces of the plurality of diamond particles have an RA of from about 2 microns to about 10 microns.
3 . The superabrasive tool of claim 1 , wherein the roughened surfaces improve the retention of the plurality of superabrasive particles in the matrix layer.
4 . The superabrasive tool of claim 1 , wherein the matrix layer is a resin layer.
5 . The superabrasive tool of claim 4 , wherein the resin layer comprises a member selected from the group consisting of amino resins, acrylate resins, alkyd resins, polyester resins, reactive urethane resins, phenolic resins, phenolic/latex resins, epoxy resins, isocyanate resins, isocyanurate resins, polysiloxane resins, reactive vinyl resins, polyethylene resins, polypropylene resins, polystyrene resins, phenoxy resins, perylene resins, polysulfone resins, acrylonitrile-butadiene-styrene resins, acrylic resins, polycarbonate resins, polyimide resins, and mixtures thereof.
6 . The superabrasive tool of claim 5 , wherein the resin layer is an epoxy resin.
7 . The superabrasive tool claim 5 , wherein the resin layer is a polycarbonate resin.
8 . The superabrasive tool of claim 5 , wherein the resin layer is a polyimide resin.
9 . The superabrasive tool of claim 1 , wherein the plurality of superabrasive particles is a member selected from the group consisting of diamond, cubic boron nitride, silicon carbide, and combinations thereof.
10 . The superabrasive tool of claim 1 , wherein the superabrasive tool is a CMP pad dresser.
11 . A method of making a superabrasive tool having improved superabrasive particle retention, comprising:
roughening surfaces of a plurality of superabrasive particles to an RA of greater than about 1 micron;
disposing the plurality of superabrasive particles in a matrix precursor; and
solidifying the matrix precursor into a matrix layer such that the plurality of superabrasive particles are held in and protrude from the matrix layer, whereby the roughened surfaces of the plurality of superabrasive particles improves retention of the plurality of superabrasive particles in the matrix layer as compared to retention of a superabrasive particle prior to roughening.
12 . The method of claim 11 , wherein roughening the surfaces further includes oxidizing the surfaces.
13 . The method of claim 11 , wherein roughening the surfaces further includes etching the surfaces.
14 . The method of claim 11 , wherein the plurality of superabrasive particles is a member selected from the group consisting of diamond, cubic boron nitride, silicon carbide, and combinations thereof.
15 . The method of claim 11 , wherein the plurality of superabrasive particles is diamond.
16 . The method of claim 15 , wherein roughening the surfaces further includes depositing diamond material on surfaces of the plurality of superabrasive particles.
17 . The method of claim 11 , wherein the plurality of superabrasive particles is arranged in the matrix layer according to a predetermined pattern.
18 . The method of claim 11 , wherein disposing the plurality of superabrasive particles in the matrix precursor and solidifying the matrix precursor into the matrix layer further includes:
providing a temporary substrate having a working surface;
applying a spacer layer to the working surface of the temporary substrate;
disposing the plurality of superabrasive particles at least partially into the spacer layer, where the plurality of superabrasive particles protrude at least partially from the spacer layer opposite the working surface of the temporary substrate;
applying the matrix precursor to the spacer layer opposite the working surface of the temporary substrate;
solidifying the matrix precursor into the matrix layer;
removing the temporary substrate from the spacer layer; and
removing the spacer layer from the matrix layer.
19 . The method of claim 18 , wherein applying a spacer layer further includes:
applying the spacer layer to the working surface of the temporary substrate; and
pressing the plurality of superabrasive particles into the spacer layer.
20 . The method of claim 18 , wherein applying a spacer layer further includes:
disposing the plurality of superabrasive particles along the working surface of the temporary substrate; and
pressing the spacer layer onto the plurality of superabrasive particles such that the superabrasive particles are disposed at least partially within the spacer layer.