Apparatus for manufacture of solar cells
View Patent ↗The present invention relates to equipment used to manufacture PV cells or modules. In some embodiments, a gas delivery and gas exhaust system are provided for processing a plurality of substrates. The gas delivery and gas exhaust system are designed such that the substrates are exposed in a uniform manner to the gas.
1. An apparatus for the treatment of substrates comprising:
a process chamber capable of holding a plurality of substrates;
wherein the process chamber is substantially cylindrical in shape having a longitudinal axis;
wherein the process chamber comprises one or more injector manifolds contained therein, the one or more injector manifolds having longitudinal axes substantially parallel to the longitudinal axis of the process chamber;
wherein the process chamber comprises one or more exhaust manifolds contained therein, the one or more exhaust manifolds having longitudinal axes substantially parallel to the longitudinal axis of the process chamber;
wherein the process chamber comprises one or more sheaths for holding thermocouples contained therein, the one or more sheaths for holding thermocouples having longitudinal axes substantially parallel to the longitudinal axis of the process chamber;
wherein the process chamber is substantially closed at a first end of the cylindrical shape and open at a second end of the cylindrical shape, the first end opposite the second end along the longitudinal axis of the process chamber;
wherein the first closed end has penetrations through the first closed end wall for the one or more injector manifolds, the one or more exhaust manifolds, and the one or more sheaths for holding thermocouples;
wherein the process chamber includes a door mechanism to close the open second end of the process chamber;
wherein the one or more injector manifolds comprise holes distributed along their length and the one or more exhaust manifolds comprise holes distributed along their length; and
wherein there are at least two injector manifolds and the holes in a first injector manifold are oriented at an angle between 30 and 60 degrees and the holes in a second injector manifold are oriented at an angle between 120 and 150 degrees, where a 0 degree angle is the angle parallel to the tangent line drawn through the point where the manifold touches the process chamber and the angles increase in a clockwise manner and the 90 degree angle points toward the longitudinal axis of the process chamber.
2. An apparatus as in claim 1 wherein the one or more injector manifolds are located on the opposite side of the process chamber from the one or more exhaust manifolds.
3. An apparatus as in claim 2 wherein the one or more injector manifolds comprise at least three holes distributed along their length and the one or more exhaust manifolds comprise at least three holes distributed along their length.
4. An apparatus as in claim 3 wherein the at least three holes of the injector manifolds are distributed evenly along the length of the one or more injector manifolds.
5. An apparatus as in claim 3 wherein the at least three holes of the injector manifolds are distributed unevenly along the length of the one or more injector manifolds.
6. An apparatus as in claim 3 wherein the at least three holes distributed along the length of the one or more injector manifolds have substantially equal size.
7. An apparatus as in claim 3 wherein the at least three holes distributed along the length of the one or more injector manifolds have substantially unequal size.
8. An apparatus as in claim 3 wherein the at least three holes of the exhaust manifolds are distributed evenly along the length of the one or more exhaust manifolds.
9. An apparatus as in claim 3 wherein the at least three holes of the exhaust manifolds are distributed unevenly along the length of the one or more exhaust manifolds.
10. An apparatus as in claim 3 wherein the at least three holes distributed along the length of the one or more exhaust manifolds have substantially equal size.
11. An apparatus as in claim 3 wherein the at least three holes distributed along the length of the one or more exhaust manifolds have substantially unequal size.
12. An apparatus as in claim 3 wherein the sum of the areas of the at least three holes distributed along the length of the one or more exhaust manifolds is equal to or greater than the sum of the areas of the at least three holes distributed along the length of the one or more injector manifolds.
13. An apparatus as in claim 1 wherein there are at least two exhaust manifolds and the holes in a first exhaust manifold are oriented at an angle between 120 and 150 degrees and the holes in a second exhaust manifold are oriented at an angle between 30 and 60 degrees.
14. An apparatus as in claim 1 wherein the process chamber is a quartz tube and the only penetrations through the quartz tube are through the first closed end wall.