Resonator, conductive film layer and oscillator
View Patent ↗A resonator element includes: a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body. In the element, the film layer includes a recessed section in which at least one film layer is removed between the first and the second regions.
1. A resonator element, comprising:
a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and
at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body, wherein the film layer includes a recessed section, the recessed section being formed between first and second regions, in which at least one film layer is removed.
2. The resonator element according to claim 1 , wherein the resonating body includes a groove section having the recessed section.
3. The resonator element according to claim 1 , wherein the resonating body vibrates in a flexural vibration mode.
4. An oscillator comprising the resonator element according to claim 1 .