Method of forming polycrystalline silicon layer, thin film transistor, organic light emitting diode display device having the same, and methods of fabricating the same
View Patent ↗A method of forming a polycrystalline silicon layer, a thin film transistor (TFT), an organic light emitting diode (OLED) display device having the same, and methods of fabricating the same. The method of forming a polycrystalline silicon layer includes providing a substrate, forming a buffer layer on the substrate, forming an amorphous silicon layer on the buffer layer, forming a groove in the amorphous silicon layer, forming a capping layer on the amorphous silicon layer, forming a metal catalyst layer on the capping layer, and annealing the substrate and crystallizing the amorphous silicon layer into a polycrystalline silicon layer.
1. A thin film transistor (TFT), comprising:
a substrate;
a buffer layer disposed on the substrate;
a semiconductor layer disposed on the buffer layer and comprising a channel region and grooves formed in a linear pattern on an upper surface of the semiconductor layer;
a gate insulating layer disposed on the semiconductor layer;
a gate electrode corresponding to the semiconductor layer; and
a source electrode and a drain electrode insulated from the gate electrode and connected to the semiconductor layer,
wherein:
a metal silicide is disposed in a seed region under the grooves;
an interval between the grooves is set so as to control a crystal grain size of a polycrystalline layer patterned to form the semiconductor layer; and
the grooves are disposed in a region of the semiconductor layer except the channel region.
2. The TFT according to claim 1 , wherein the metal silicide is continuously disposed along the groove.
3. The TFT according to claim 1 , wherein the metal silicide is formed of a material selected from the group consisting of Nickel (Ni), Palladium (Pd), Silver (Ag), Gold (Au), Aluminum (Al), Tin (Sn), Antimony (Sb), Copper (Cu), Titanium (Ti), and Cadmium (Cd).
4. The TFT according to claim 1 , wherein the grooves are formed perpendicular to a current flow of the semiconductor layer.
5. An organic light emitting diode (OLED) display device, comprising:
a substrate;
a buffer layer disposed on the substrate;
a semiconductor layer disposed on the buffer layer and comprising a channel region and grooves formed in a linear pattern on an upper surface of the semiconductor layer;
a gate insulating layer disposed on the semiconductor layer;
a gate electrode corresponding to the semiconductor layer;
a source electrode and a drain electrode insulated from the gate electrode and connected to the semiconductor layer;
an insulating layer disposed on the substrate;
a first electrode electrically connected to one of the source electrode and the drain electrode;
an organic layer disposed on the first electrode; and
a second electrode disposed on the organic layer,
wherein:
a metal silicide is disposed in a seed region under the grooves;
an interval between the grooves is set so as to control a crystal grain size of a polycrystalline layer patterned to form the semiconductor layer; and
the grooves are disposed in a region of the semiconductor layer except the channel region.
6. The device according to claim 5 , wherein the metal silicide is continuously disposed along the groove.
7. The device according to claim 5 , wherein the metal silicide is formed of a material selected from the group consisting of Nickel (Ni), Palladium (Pd), Silver (Ag), Gold (Au), Aluminum (Al), Tin (Sn), Antimony (Sb), Copper (Cu), Titanium (Ti), and Cadmium (Cd).
8. The device according to claim 5 , wherein the grooves are formed perpendicular to current flow of the semiconductor layer.