Device for holding a template for use in imprint lithography
View Patent ↗An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
1. A device for holding a nanolithography template used for imprinting a nanolithography pattern on a substrate, the device comprising:
a body having an opening to receive the nanolithography template, the body for positioning the template relative to the substrate for imprinting the nanolithography pattern on the substrate; and
a supporting plate coupled to the body and positioned relative to the nanolithography template to support a force of the imprinting on the nanolithography template, with the supporting plate being substantially transparent to a curing agent; and,
an actuator system coupled to the body to vary dimensions of the nanolithography template with independently controlled force.
2. The device as recited in claim 1 wherein the curing agent comprises ultraviolet radiation.
3. The device as recited in claim 1 wherein the supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
4. The device as recited in claim 1 further including a vacuum system in fluid communication with the supporting plate to apply a vacuum to the nanolithography template.
5. The device as recited in claim 1 further including a vacuum system in fluid communication with the supporting plate to apply a vacuum between the supporting plate and the body.
6. The device as recited in claim 1 wherein the supporting plate is configured to reduce deformation of the nanolithography template due to forces present during an imprint lithography process.
7. The device as recited in claim 1 further including a reflective element connected to a portion of the body located within the opening.
8. A device for holding a nanolithography template used for imprinting a nanolithography pattern on a substrate, the device comprising:
a body having an opening to receive the nanolithography template, the body for positioning the template relative to the substrate for imprinting the nanolithography pattern on the substrate; and
a supporting plate coupled to the body and positioned relative to the nanolithography template to support a force of the imprinting on the nanolithography template, with the supporting plate substantially transparent to ultraviolet radiation; and,
an actuator system coupled to said body to vary dimensions of said nanolithography template with independently controlled force.
9. The device as recited in claim 8 wherein the supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
10. The device as recited in claim 8 further including a vacuum system in fluid communication with the supporting plate to apply a vacuum to the nanolithography template.
11. The device as recited in claim 8 further including a vacuum system in fluid communication with the supporting plate to apply a vacuum between the supporting plate and the body.
12. The device as recited in claim 8 wherein the supporting plate is configured to reduce deformation of the nanolithography template due to forces present during an imprint lithography process.
13. The device as recited in claim 8 further including a reflective element connected to a portion of the body located within the opening.
14. A device for holding a nanolithography template used for imprinting a nanolithography pattern on a substrate, the device comprising:
a body having an opening to receive the nanolithography template, the body for positioning the template relative to the substrate for imprinting the nanolithography pattern on the substrate;
a supporting plate coupled to the body and positioned relative to the nanolithography template to support a force of the imprinting on the nanolithography template, with the supporting plate substantially transparent to a curing agent
an actuator system coupled to said body to vary dimensions of said nanolithography template with independently controlled force; and
a vacuum system in fluid communication with the supporting plate to apply a vacuum between the supporting plate and the body.
15. The device as recited in claim 14 wherein the curing agent comprises ultraviolet radiation.
16. The device as recited in claim 14 wherein the supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
17. The device as recited in claim 14 wherein the supporting plate is configured to reduce deformation of the nanolithography template due to forces present during an imprint lithography process.
18. The device as recited in claim 14 further including a reflective element connected to a portion of the body located within the opening.