Method of manufacturing doping patterns

1. A method of manufacturing doping patterns comprising steps of:

providing a substrate having a plurality of shallow trench isolations (STIs) formed therein, the STIs defining and electrically isolating a plurality of active regions having a same polarity of n-type or p-type, wherein forming the STIs comprises:

providing a STI defining pattern to define a plurality of STI regions on the substrate; and

forming the STIs respectively in the STI regions;

forming a patterned photoresist having a plurality of exposing regions for exposing the active regions and the STIs in between the active regions on the substrate, wherein forming the patterned photoresist comprises:

providing a predetermined doping pattern having a plurality of first dope-blocking regions and a plurality of first dope-exposing regions;

comparing the predetermined doping pattern with the STI defining pattern;

merging the first dope-exposing regions to form a modified doping pattern having a plurality of second dope-exposing regions and a plurality of second dope-blocking regions when the STI defining pattern is in between the adjacent first dope-exposing regions; and

transferring the modified doping pattern to a photoresist to form the patterned photoresist; and

performing an ion implantation to form a plurality of doping patterns in the active regions through the patterned photoresist, wherein at least two doping patterns have the same polarity of n-type or p-type are adjacent to and electrically isolated from each other by the STI.

2. The method of claim 1 , wherein the modified doping pattern is formed on an implantation photomask.

3. The method of claim 1 , wherein the exposing regions of the patterned photoresist are corresponding to the second dope-exposing regions, respectively.

4. The method of claim 1 , wherein the patterned photoresist further comprises a plurality of blocking regions respectively corresponding to the second dope-blocking regions of the modified doping pattern.

5. The method of claim 1 , wherein the ion implantation comprises an n-type ion implantation or a p-type ion implantation.

6. The method of claim 1 , wherein the doping pattern comprises an active region doping pattern.

7. A method of manufacturing an implantation photomask comprising steps of:

providing a predetermined doping pattern and a STI defining pattern, the predetermined doping pattern further comprising a plurality of first dope-blocking regions and a plurality of first dope-exposing regions;

modifying the predetermined doping pattern with STI defining pattern to form a modified doping pattern, the step of forming the modified doping pattern further comprising:

comparing the predetermined doping pattern with the STI defining pattern;

merging the first dope-exposing regions to form a plurality of second dope-exposing regions when the STI defining pattern is in between the adjacent first dope-exposing regions; and

forming a plurality of second dope-blocking regions; and

outputting the modified doping pattern on a photomask.