Mask, method for manufacturing the same, and method for manufacturing semiconductor device
View Patent ↗A mask having mask patterns for the transfer of a desired circuit pattern, a method for manufacturing the mask, and a semiconductor device manufacturing method using the mask, are provided. There are extracted two rectangular aperture patterns which are adjacent each other in an obliquely disposed state with respect to an X axis in an XY plane. The thus-extracted two rectangular aperture patterns are rotated at a certain angle so that a pattern edge corresponding to one side of one of the rectangular aperture patterns and a pattern edge corresponding to one side of the other rectangular aperture pattern are opposed in parallel to each other. The two rectangular aperture patterns thus rotated at a certain angle are then subjected to optical proximity effect correction to form two corrected rectangular aperture patterns.
1. A method for manufacturing a mask which is forming certain patterns by photolithography to a photosensitive material film formed on a substrate, comprising the steps of:
extracting, out of rectangular aperture patterns having pattern edges parallel to an X axis and pattern edges parallel to a Y axis orthogonal to the X axis in an XY plane defined by the X and Y axes, two rectangular aperture patterns adjacent each other in a state in which a line segment joining the center of one of the rectangular aperture patterns and the center of the other rectangular aperture pattern is inclined with respect to the X axis;
rotating each of the thus-extracted two rectangular aperture patterns at a certain angle in such a manner that a pattern edge corresponding to one side of one of the rectangular aperture patterns and a pattern edge corresponding to one side of the other rectangular aperture pattern are opposed in parallel to each other and can be spaced apart the longest distance;
subjecting each of the two rectangular aperture patterns rotated at a certain angle to optical proximity effect correction to form two corrected aperture patterns; and
performing, on the basis of the two corrected aperture patterns, electron beam exposure on a radiation sensitive resist material film stacked on a mask member formed on a certain substrate, thereby forming rectangular mask aperture patterns corresponding to the two corrected aperture patterns.
2. A method for manufacturing a mask according to claim 1 , further comprising, between the step of rotation at a certain angle and the step of forming the corrected aperture patterns, the step of forming non-resolvable aperture patterns around the two rectangular aperture patterns over the photosensitive material film.
3. A method for manufacturing a mask according to claim 1 , further comprising, before the step of rotation at a certain angle, the step of forming non-resolvable aperture patterns around the two rectangular aperture patterns over the photosensitive material film.
4. A method for manufacturing a mask according to claim 1 , wherein the certain angle is an angle set on the basis of an angle between the line segment joining the centers of the two adjacent rectangular aperture patterns and the X axis.
5. A method for manufacturing a mask according to claim 1 , wherein the certain angle is 45°.