TFT-LCD array substrate and manufacturing method thereof

1. A manufacturing method of a thin film transistor liquid crystal display (TFT-LCD) array substrate, comprising:

Step 1 of depositing a gate metal film on a substrate, forming a gate line, a gate electrode and a common electrode line for each pixel region by patterning the gate metal film, wherein the common electrode line is common to two vertically adjacent pixel regions;

Step 2 of depositing a gate insulating layer, a semiconductor film, and a doped semiconductor film and a source/drain metal film on the substrate after Step 1, forming an active layer island, a data line, and a drain electrode, a source electrode and a thin film transistor (TFT) channel for each pixel region by patterning the gate insulating layer, the semiconductor film, the doped semiconductor film and the source/drain metal film;

Step 3 of depositing a passivation layer on the substrate after Step 2, forming a through hole in the passivation layer above the drain electrode by patterning the passivation layer; and

Step 4 of depositing a transparent conductive film on the substrate after Step 3, forming a pixel electrode of each pixel region, which is connected with the drain electrode through the passivation through hole, by patterning the transparent conductive film,

wherein, forming the active layer island, the data line, and the drain electrode, the source electrode and the TFT channel by patterning the gate insulating layer in Step 2 comprises:

on the substrate after Step 1, depositing the gate insulating layer, the semiconductor film and the doped semiconductor film sequentially by a plasma enhanced chemical vapor deposition method, and subsequently, depositing the source/drain metal film by a magnetic sputtering method or a thermal evaporation method;

applying a layer of photoresist on the source/drain metal film;

exposing the photoresist by using a half tone mask or a grey tone mask, so as to form a photoresist-completely-retained region, a photoresist-completely-removed region and a photoresist-partially-retained region, wherein the photoresist-completely-retained region corresponds to the regions of the data line, the source electrode and the drain electrode, the photoresist-partially-retained region corresponds to the TFT channel region between the source electrode and the drain electrode, and the photoresist-completely-removed region corresponds to the remaining region; after developing the photoresist, the thickness of the photoresist in the photoresist-completely-retained region remains unchanged, the photoresist in the photoresist-completely-removed, region is removed completely, and the thickness of the photoresist in the photoresist-partially-retained region is reduced;

etching away the source/drain metal film, the doped semiconductor film and the semiconductor film in the photoresist-completely-removed region by a first etching so as to form the active layer island and the data line;

removing the photoresist in the photoresist-partially-retained region to expose the source/drain metal film;

etching away the source/drain metal film and the doped semiconductor film and partially etching the semiconductor film in the thickness direction in the photoresist-partially-retained region by a second etching process, so that the semiconductor film in the photoresist-partially-retained region is exposed and the source electrode, the drain electrode and the TFT channel region are formed; and

lifting off the remaining photoresist.

2. The manufacturing method of the TFT-LCD array substrate of claim 1 , wherein a first light blocking bar and a second light blocking bar that are connected with the common electrode line is formed simultaneously, and the first light blocking bar and the second light blocking bar are parallel with the data line and positioned at the two sides of each pixel region.

3. The manufacturing method of the TFT-LCD array substrate of claim 2 ,

wherein a first light blocking bar and a second light blocking bar that are connected with the common electrode line is formed simultaneously, and the first light blocking bar and the second light blocking bar are parallel with the data line and positioned at the two sides of each pixel region.

4. A manufacturing method of a thin film transistor liquid crystal display (TFT-LCD) array substrate, comprising:

Step 1 of depositing a gate metal film on a substrate, forming a gate line, a gate electrode and a common electrode line for each pixel region by patterning the gate metal film, wherein the common electrode line is common to two vertically adjacent pixel regions;

Step 2 of depositing a gate insulating layer, a semiconductor film, and a doped semiconductor film and a source/drain metal film on the substrate after Step 1, forming an active layer island, a data line, and a drain electrode, a source electrode and a thin film transistor (TFT) channel for each pixel region by patterning the gate insulating layer, the semiconductor film, the doped semiconductor film and the source/drain metal film;

Step 3 of depositing a passivation layer on the substrate after Step 2, forming a through hole in the passivation layer above the drain electrode by patterning the passivation layer; and

Step 4 of depositing a transparent conductive film on the substrate after Step 3, forming a pixel electrode of each pixel region, which is connected with the drain electrode through the passivation through hole, by patterning the transparent conductive film,

wherein forming the active layer island, the data line, and the drain electrode, the source electrode and the TFT channel by patterning the gate insulating layer in Step 2 comprises:

on the substrate after Step 1, depositing the gate insulating layer, the semiconductor film and the doped semiconductor film sequentially by a plasma enhanced chemical vapor deposition method; forming the active layer island by a patterning process with a normal mask;

depositing the source/drain metal film by a magnetic sputtering method or a thermal evaporation method; and

forming the data line, the source electrode, the drain electrode and the TFT channel region by a patterning process with a normal mask.