Layered scanning charged particle microscope package for a charged particle and radiation detector
View Patent ↗A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder.
1. A scanning charged particle microscope, comprising:
a layered charged particle beam column package;
a sample holder; and
a layered micro-channel plate detector package located between the beam column package and the sample holder.
2. The microscope of claim 1 , wherein the layers of the detector package are ceramic.
3. The microscope of claim 2 , wherein the layers of the detector package are made of LTCC or HTCC.
4. The microscope of claim 1 , wherein the detector comprises dual micro-channel plates and has an overall combined thickness of less than about 1.3 mm.
5. The microscope of claim 1 , wherein a layer of the detector package includes a collector for collecting electrons.
6. The microscope of claim 5 , wherein the collector comprises a plurality of isolated segments.
7. The microscope of claim 6 , further comprising interconnects coupled to the collector segments for independently contacting each segment.
8. The microscope of claim 5 , wherein the collector includes a CCD or CMOS cell.
9. The microscope of claim 1 , wherein at least two layers of the layered detector package have surface metallization.
10. The microscope of claim 1 , further comprising a collector, collector traces and interconnects, bias interconnects, and a high voltage interconnect all patterned onto a single layer of the detector package.
11. A method, comprising:
generating a charged particle beam;
focusing the beam with a charged particle beam column assembly onto a sample, the beam column assembly having a layered charged particle beam column package; a sample holder holding the sample; and a micro-channel plate detector, the detector having a layered detector package, located between the beam column assembly and the sample holder;
scanning the beam over the sample; and
detecting charged particles from the sample with the detector.
12. The method of claim 11 , wherein the layers of the detector package are ceramic.
13. The method of claim 12 , wherein the layers of the detector package are made of LTCC or HTCC.
14. The method of claim 11 , wherein the detector comprises dual micro-channel plates and has an overall combined thickness of less than about 1.3 mm.
15. The method of claim 11 , wherein a layer of the detector package includes a collector for collecting electrons.
16. The method of claim 15 , wherein the collector comprises a plurality of isolated segments.
17. The method of claim 16 , wherein the detector further comprises interconnects coupled to the segments for independently contacting each segment and wherein the method further comprises:
summing individual collector segment signals positively or negatively such that the reconstructed image represents contrast resulting from electron trajectories primarily along a single axis.
18. The method of claim 15 , wherein the collector includes a CCD or CMOS cell.
19. The method of claim 11 , wherein at least two layers of the layered detector package have surface metallization.
20. The method of claim 11 , wherein the detector further comprises a collector, collector traces and interconnects, bias interconnects, and a high voltage interconnect all patterned onto a single layer of the detector package.