IP Library › Granted Patent US 8,138,470
Granted Patent B2
US 8,138,470 · App. 12/720,200 · Granted Mar 20, 2012

Calibration standards for electron microscopes and electron column tools

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Quick Facts
Patent No.
US 8,138,470
App. No.
12/720,200
Granted
Mar 20, 2012
Kind
B2
Abstract

A calibration standard structured to obtain both morphology and chemistry information with respect to particles analyzed simultaneously. The standard is structured to verify the accuracy of the data obtained in the particle analysis. Related methods of manufacture and use are provided.

Claims (8)

1. A standard for use in particle analysis by way of electron column tools comprising

a semiconductor standard structured to provide simultaneous morphology and chemistry information with respect to particles being analyzed.

2. The standard for use in particle analysis by way of electron column tools of claim 1 including

said standard having portions structured to evaluate size, shape, chemistry, and location.

3. The standard for use in particle analysis by way of electron column tools of claim 1 including

said standard being structured to be modified in order to be employed with different electron column tools.

4. The standard for use in particle analysis by way of electron column tools of claim 3 including

said standard being structured to be employed with scanning transmission electron microscopes.

Assignments (1)
PATENT AND TRADEMARK SECURITY AGREEMENT Recorded Feb 28, 2019
From: RJ LEE GROUP, INC.
To: CADENCE BANK, N.A.
Reel/Frame 048477/0733 →