Method of measuring topology of functional liquid droplet in pixel, topology measuring apparatus of functional liquid in pixel, liquid ejection apparatus, method of manufacturing electro-optical apparatus, electro-optical apparatus, and electronic apparatus
View Patent ↗A method of measuring topology of functional liquid in a pixel, in which thickness or volume of the functional liquid in the pixel is measured by a surface topology measuring apparatus comprising: measuring surface topologies in which surface topology of the functional liquid in the pixel and surface topology of the bank are measured by the surface topology measuring apparatus, and measurement parameters regarding the surface topologies are generated; adding a bank height in which a height parameter of a height of the bank is added to the measurement parameter of a surface of the functional liquid in the pixel of the measurement parameter generated; and calculating topology in which the thickness or the volume of the functional liquid in the pixel is calculated based on the added measurement parameter of the surface of the functional liquid in the pixel and the measurement parameter of the surface of the bank.
1. A method of measuring topology, the method comprising:
ejecting liquid material on a substrate, the substrate having a bank defining a pixel region;
drying the material;
measuring a surface topology of the dried material and of the bank by an interferometer;
calculating at least one of thickness and volume of the dried material by adding height of the bank to the surface topology at the dried material.
2. A method of measuring topology, the method comprising:
ejecting liquid material on a substrate, the substrate haying a bank defining a pixel region;
drying the material;
measuring a surface topology of the dried material and of the bank by an interferometer;
calculating the at least one of thickness and volume of the dried material by subtracting height of the bank from the surface topology at the bank.