Lead frame, lead frame fabrication, and semiconductor device
View Patent ↗Lead frames and their fabricating method which reduce generation of defects in the process of fabricating semiconductor devices, in particular connection defects in wire bonding, thereby improving the product yield and reliability, and semiconductor devices using the lead frames and their fabricating method are provided. A method for fabricating a lead frame is characterized in including a process of forming a substrate equipped with a convex portion, and a metal layer having a first portion that overlaps a first surface included in the convex portion and a second portion that extends from the first portion and does not overlap the first surface, and a process of bending the metal layer such that the second portion of the metal layer overlaps a second surface included in the convex portion that intersects the first surface.
1. A method for fabricating a lead frame, the method comprising:
forming a substrate equipped with a convex portion, and a metal layer having a first portion that overlaps a first surface of the convex portion and a second portion that extends from the first portion and does not overlap the first surface; and
bending the metal layer such that the second portion of the metal layer overlaps a second surface of the convex portion that intersects the first surface.
2. A method for fabricating a lead frame according to claim 1 , wherein the forming of the substrate includes forming the metal layer on a surface of a metal substrate, and forming the convex portion by wet etching the metal substrate using the metal layer as a mask.
3. A method for fabricating a lead frame according to claim 1 , wherein the forming of the substrate includes:
coating a first resist film on a surface of a metal substrate;
wet-etching the metal substrate with the first resist film as a mask;
removing the first resist film after the wet-etching;
coating a second resist film in a concave portion formed by the etching, after the removing of the first resist film;
forming the metal layer on the metal substrate exposed through the second resist film, after the coating of the second resist film; and
removing the second resist film, after the forming of the metal layer.
4. A method for fabricating a lead frame recited in claim 1 , wherein the forming of the substrate includes forming the substrate to have a plurality of the convex portions, wherein the plurality of the convex portions have the same shape and the same size.
5. A lead frame comprising:
a substrate equipped with a convex portion, and a metal layer having a first portion that overlaps a first surface of the convex portion and a second portion that extends from the first portion and does not overlap the first surface, and wherein the second portion of the metal layer being bent in a manner to overlap a second surface of the convex portion that intersects the first surface.
6. A lead frame according to claim 5 , wherein an angle of intersection between the first surface and the second surface is an acute angle in a cross-sectional view.
7. A semiconductor device wherein comprising:
a substrate equipped with a convex portion, and a metal layer having a first portion that overlaps a first surface of the convex portion and a second portion that extends from the first portion and does not overlap the first surface;
an IC element fixed to the substrate and having an electrode;
a conductive member that connects the metal layer to the electrode of the IC element; and
a resin that seals the IC element and the conductive member.