HEATING LAMP SYSTEM
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a heating lamp assembly for a vapor deposition reactor system is provided which includes a lamp housing disposed on an upper surface of a support base and containing a first lamp holder and a second lamp holder and a plurality of lamps extending from the first lamp holder to the second lamp holder. The plurality of lamps may have split filament lamps and/or non-split filament lamps, and in some examples, split and non-split filament may be alternately disposed between the first and second lamp holders. A reflector may be disposed on the upper surface of the support base between the first and second lamp holders. The reflector may contain gold or a gold alloy.
1 . A heating lamp assembly for a vapor deposition reactor system, comprising:
a lamp housing disposed on an upper surface of a support base and comprising a first lamp holder and a second lamp holder;
a first plurality of lamps extending from the first lamp holder to the second lamp holder, wherein each lamp of the first plurality of lamps comprises a split filament lamp;
a second plurality of lamps extending from the first lamp holder to the second lamp holder, wherein each lamp of the second plurality of lamps comprises a non-split filament lamp; and
a reflector disposed on the upper surface of the support base between the first lamp holder and the second lamp holder.
2 . The heating lamp assembly of claim 1 , wherein the split filament lamps are alternately disposed between the non-split filament lamps.
3 . The heating lamp assembly of claim 1 , wherein each of the first plurality of lamps and each of the second plurality of lamps are alternately disposed between the first and second lamp holders.
4 . The heating lamp assembly of claim 1 , wherein the first and second pluralities of lamps have a total amount of lamps within a range from about 10 lamps to about 100 lamps.
5 . The heating lamp assembly of claim 4 , wherein the total amount of lamps is within a range from about 30 lamps to about 40 lamps.
6 . The heating lamp assembly of claim 1 , wherein an upper surface of the reflector comprises gold or a gold alloy.
7 . The heating lamp assembly of claim 1 , further comprising at least one mirror extending along the upper surface of the support base, and extending from the reflector at an angle of about 90°.
8 . The heating lamp assembly of claim 1 , further comprising two mirrors extending along the upper surface of the support base, facing each other, and extending from the reflector at an angle of about 90°.
9 . The heating lamp assembly of claim 1 , wherein each lamp is in electrical contact with a power source, an independent switch, and a controller.
10 . The heating lamp assembly of claim 1 , further comprising a controller for independently controlling power to each of the lamps.
11 . The heating lamp assembly of claim 1 , wherein the support base comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
12 . The heating lamp assembly of claim 1 , wherein the first lamp holder or the second lamp holder independently comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
13 . The heating lamp assembly of claim 12 , wherein the first lamp holder or the second lamp holder independently comprises stainless steel or alloys thereof.
14 . The heating lamp assembly of claim 13 , wherein the first lamp holder or the second lamp holder independently has a cooling coefficient within a range from about 2,000 W/m 2 -K to about 3,000 W/m 2 -K.
15 . The heating lamp assembly of claim 14 , wherein the cooling coefficient is within a range from about 2,300 W/m 2 -K to about 2,700 W/m 2 -K.
16 . The heating lamp assembly of claim 12 , wherein the first lamp holder and the second lamp holder each have a thickness within a range from about 0.001 inches to about 0.1 inches.
17 . A heating lamp assembly for a vapor deposition reactor system, comprising:
a lamp housing disposed on an upper surface of a support base and comprising a first lamp holder and a second lamp holder;
a first plurality of posts disposed on the first lamp holder and a second plurality of posts disposed on the second lamp holder;
a plurality of lamps, wherein each lamp comprises a split filament lamp or a non-split filament lamp, and each lamp is disposed between a pair of posts on the first lamp holder, extends from the first lamp holder to the second lamp holder, and is disposed between a pair of posts on the second lamp holder; and
a reflector disposed on the upper surface of the support base between the first lamp holder and the second lamp holder.
18 . The heating lamp assembly of claim 17 , wherein the split filament lamps are alternately disposed between the non-split filament lamps.
19 . The heating lamp assembly of claim 17 , wherein each of the first plurality of lamps and each of the second plurality of lamps are alternately disposed between the first and second lamp holders.
20 . The heating lamp assembly of claim 17 , wherein the plurality of lamps have a total amount of lamps within a range from about 10 lamps to about 100 lamps.
21 . The heating lamp assembly of claim 20 , wherein the total amount of lamps is within a range from about 30 lamps to about 40 lamps.
22 . The heating lamp assembly of claim 17 , wherein an upper surface of the reflector comprises gold or a gold alloy.
23 . The heating lamp assembly of claim 17 , further comprising at least one mirror extending along the upper surface of the support base, and extending from the reflector at an angle of about 90°.
24 . The heating lamp assembly of claim 17 , further comprising two mirrors extending along the upper surface of the support base, facing each other, and extending from the reflector at an angle of about 90°.
25 . The heating lamp assembly of claim 17 , wherein each lamp is in electrical contact with a power source, an independent switch, and a controller.
26 . The heating lamp assembly of claim 17 , further comprising a controller for controlling independent power to each of the lamps.
27 . The heating lamp assembly of claim 17 , wherein the support base comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
28 . The heating lamp assembly of claim 17 , wherein the first lamp holder or the second lamp holder independently comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
29 . The heating lamp assembly of claim 28 , wherein the first lamp holder or the second lamp holder independently comprises stainless steel or alloys thereof.
30 . The heating lamp assembly of claim 29 , wherein the first lamp holder or the second lamp holder independently has a cooling coefficient within a range from about 2,000 W/m 2 -K to about 3,000 W/m 2 -K.
31 . The heating lamp assembly of claim 30 , wherein the cooling coefficient is within a range from about 2,300 W/m 2 -K to about 2,700 W/m 2 -K.
32 . The heating lamp assembly of claim 28 , wherein the first lamp holder and the second lamp holder each have a thickness within a range from about 0.001 inches to about 0.1 inches.
33 . A heating lamp assembly for a vapor deposition reactor system, comprising:
a lamp housing disposed on an upper surface of a support base and comprising a first lamp holder and a second lamp holder;
a first plurality of posts disposed on the first lamp holder and a second plurality of posts disposed on the second lamp holder;
a plurality of lamps extending from the first lamp holder to the second lamp holder, wherein a first end of each lamp is disposed between two posts on the first lamp holder and a second end of each lamp is disposed between two posts on the second lamp holder; and
a reflector disposed on the upper surface of the support base between the first lamp holder and the second lamp holder.
34 . The heating lamp assembly of claim 33 , wherein the plurality of lamps comprises split filament lamps and non-split filament lamps.
35 . The heating lamp assembly of claim 34 , wherein the split filament lamps are alternately disposed between the non-split filament lamps.
36 . The heating lamp assembly of claim 33 , wherein the plurality of lamps have a total amount of lamps within a range from about 10 lamps to about 100 lamps.
37 . The heating lamp assembly of claim 36 , wherein the total amount of lamps is within a range from about 30 lamps to about 40 lamps.
38 . The heating lamp assembly of claim 33 , wherein an upper surface of the reflector comprises gold or a gold alloy.
39 . The heating lamp assembly of claim 33 , further comprising at least one mirror extending along the upper surface of the support base, and extending from the reflector at an angle of about 90°.
40 . The heating lamp assembly of claim 33 , further comprising two mirrors extending along the upper surface of the support base, facing each other, and extending from the reflector at an angle of about 90°.
41 . The heating lamp assembly of claim 33 , wherein each lamp is in electrical contact with a power source, an independent switch, and a controller.
42 . The heating lamp assembly of claim 33 , further comprising a controller for independently controlling power to each lamp.
43 . The heating lamp assembly of claim 33 , wherein the support base comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
44 . The heating lamp assembly of claim 33 , wherein the first lamp holder or the second lamp holder independently comprises a material selected from the group consisting of steel, stainless steel, 300 series stainless steel, iron, nickel, chromium, molybdenum, aluminum, alloys thereof, and combinations thereof.
45 . The heating lamp assembly of claim 44 , wherein the first lamp holder or the second lamp holder independently comprises stainless steel or alloys thereof.
46 . The heating lamp assembly of claim 45 , wherein the material of the first lamp holder or the second lamp holder independently has a cooling coefficient within a range from about 2,000 W/m 2 -K to about 3,000 W/m 2 -K.
47 . The heating lamp assembly of claim 46 , wherein the cooling coefficient is within a range from about 2,300 W/m 2 -K to about 2,700 W/m 2 -K.
48 . The heating lamp assembly of claim 44 , wherein the first lamp holder and the second lamp holder each have a thickness within a range from about 0.001 inches to about 0.1 inches.