Solid-state imaging device with a planarized lens layer method of manufacturing the same, and electronic apparatus
View Patent ↗A solid-state imaging device includes a light sensing portion which is formed on a substrate and generates a signal electric charge according to incident light; a rectangular or gradient-index on-chip micro lens formed on a light incident side above the light sensing portion; and a planarized lens layer which covers the on-chip micro lens and is formed in such a manner that a light incident surface is planarized.
1. A solid-state imaging device comprising:
a light sensing portion which is on a substrate and generates a signal electric charge according to incident light;
a wiring layer on a light incident side of the light sensing portion;
a rectangular or gradient-index on-chip micro lens on the light incident side above the light sensing portion;
a color filter between the wiring layer and the on-chip lens, and a planarized lens layer which covers the on-chip micro lens and has a light incident surface that is planarized, wherein:
the on-chip lens includes a convex portion and a concave portion,
the convex portion has a recta extends continuously over the entire light sensing portion,
the solid-state imaging device comprises a plurality of pixels, and
the concave portion is between adjacent pixels.
2. The solid-state imaging device according to claim 1 , wherein a refraction index of the planarized lens layer is larger than a refraction index of air and is smaller than a refraction index of the on-chip micro lens.
3. The solid-state imaging device according to claim 2 , wherein the gradient index on-chip micro lens is a Fresnel lens.
4. The solid-state imaging device according to claim 2 , wherein the gradient index on-chip micro lens is an optical element for sub-micrometer wavelengths.
5. A solid-state imaging device comprising:
a light sensing portion which is on a substrate and generates a signal electric charge according to incident light;
a rectangular or gradient-index on-chip micro lens on a light incident side above the light sensing portion; and
a planarized lens layer which covers the on-chip micro lens and has a light incident surface that is planarized,
wherein,
the planarized lens layer includes a first planarized lens layer which is buried to a height of an upper face of the rectangular on-chip micro lens, and a second planarized lens layer which has a refraction index different from a refraction index of the first planarized lens layer and covers the upper face of the on-chip micro lens and an upper face of the first planarized lens layer.
6. The solid-state imaging device according to claim 5 , wherein:
the refraction index of the first planarized lens layer is smaller than the refraction index of the second planarized lens layer, and
the refraction index of the second planarized lens layer is smaller than the refraction index of the on-chip micro lens.
7. A method of manufacturing the solid-state imaging device comprising the steps of:
forming a light sensing portion which generates a signal electric charge according to incident light, on a substrate;
forming a rectangular on-chip micro lens on a light incident side above the light sensing portion;
forming a first planarized lens layer so as to cover the on-chip micro lens;
removing the first planarized lens layer until the upper face of the on-chip micro lens is exposed; and
forming a second planarized lens layer, on the upper face of the on-chip micro lens, and on the upper face of the first planarized lens layer so that the first planarized lens layer is buried to the height of the upper face of the on-chip micro lens.
8. The method of manufacturing the solid-state imaging device according to claim 7 , wherein:
a refraction index of the first planarized lens layer is smaller than a refraction index of the second planarized lens layer, and
a refraction index of the second planarized lens layer is smaller than a refraction index of the on-chip micro lens.
9. The method of manufacturing the solid-state imaging device according to claim 7 , wherein the gradient-index on-chip micro lens is a Fresnel lens.
10. The method of manufacturing the solid-state imaging device according to claim 7 , wherein the gradient-index on-chip micro lens is an optical element for sub-micrometer wavelengths.
11. An electronic apparatus comprising:
an optical lens;
a solid-state imaging device that includes a light sensing portion which is on a substrate and generates a signal electric charge according to incident light, a wiring later on a light incident side of the light sensing portion, a rectangular or gradient-index on-chip micro lens on the light incident side above the light sensing portion, a color filter between the wiring layer and the on-chip lens, and a planarized lens layer which covers the on-chip micro lens and that has a light incident surface that is planarized, the light collected in the optical lens being incident thereon, wherein,
the planarized lens layer includes a first planarized lens layer which is buried to a height of an upper face of the rectangular on-chip micro lens, and a second planarized lens layer which has a refraction index different from a refraction index of the first planarized lens layer and covers the upper face of the on-chip micro lens and an upper face of the first planarized lens layer, and
a signal processing circuit for processing the output signal output from the solid-state imaging device.