Inkjet printhead intergrated configured to minimize thermal losses
View Patent ↗Provided is an inkjet printhead integrated circuit that has a wafer substrate that has an ink passage, and a nozzle plate supported on the substrate by side walls to define an ink chamber supplied with ink via the ink passage. The nozzle plate has an ink ejection port corresponding to the ink chamber. A heater element is bonded to the nozzle plate inside the chamber for vaporising ink to generate a vapor bubble that ejects ink through the ejection port. The heater element is bonded to the nozzle plate with a low thermal product layer. The thermal product thermal product is less than 1495 Jm −2 K −1 s −1/2 , the thermal product being (ρCk) 1/2 , where ρ is the density of the layer, C is specific heat of the layer and k is thermal conductivity of the layer.
1. An inkjet printhead integrated circuit comprising:
a wafer substrate defining an ink passage;
a nozzle plate supported on said substrate by side walls to define an ink chamber operatively supplied with ink via said ink passage, the nozzle plate defining an ink ejection port corresponding to the ink chamber; and
a heater element bonded to the nozzle plate inside the chamber for vaporising ink to generate a vapour bubble that ejects ink through the ejection port, the heater element being bonded to the nozzle plate with a low thermal product layer; wherein,
the low thermal product layer has a thermal product less than 1495 Jm −2 K −1 s −1/2 , the thermal product being (ρCk) 1/2 , where ρ is the density of the layer, C is specific heat of the layer and k is thermal conductivity of the layer.
2. The inkjet printhead integrated circuit of claim 1 , wherein the heater element is comprised of titanium aluminium nitride.
3. The inkjet printhead integrated circuit of claim 1 , wherein the wafer substrate includes a layer of CMOS drive circuitry for actuating the heater element.
4. The inkjet printhead integrated circuit of claim 1 , wherein the low thermal product layer is a SiOCH film deposited by means of chemical vapour deposition techniques.
5. The inkjet printhead integrated circuit of claim 1 , wherein the nozzle plate is formed from silicon nitride.
6. The inkjet printhead integrated circuit of claim 1 , wherein the heater element includes an insulating layer over the element and a protective layer over the insulating layer.
7. The inkjet printhead integrated circuit of claim 3 , wherein the heater element is subjected to thermal pulse heating via the CMOS drive circuitry to facilitate ink ejection.