BAW structure with reduced topographic steps and related method
View Patent ↗According to one embodiment, a method of forming a segment of a layer of material, where the segment of the layer of material has at least one tapered sidewall, is disclosed, where the method includes forming a mask over the layer of material. The method includes etching the mask and the layer of material in an etch process by controlling an etch rate of the mask and an etch rate of the layer of material so as to form the segment of the layer of material with the at least one tapered sidewall. A first etch chemistry is used to etch the mask and a second etch chemistry is used to etch the layer of material. The etch rates of the mask and the layer of material can be controlled by controlling a ratio of the first and second etch chemistries. The method can be utilized to fabricate BAW structures.
1. A bulk acoustic wave (BAW) structure comprising:
a lower electrode situated over a substrate, said lower electrode having at least one tapered sidewall;
a piezoelectric layer situated over said lower electrode;
an upper electrode situated over said piezoelectric layer; and
an acoustic mirror situated between said lower electrode and said substrate, said acoustic mirror comprising a plurality of metal segments,
wherein each of said plurality of metal segments has at least one tapered sidewall, and wherein each tapered sidewall of said plurality of metal segments has a slope substantially equal to a slope of said at least one tapered sidewall of said lower electrode.
2. The BAW structure of claim 1 , wherein each of said plurality of metal segments has tapered sidewalls.
3. The BAW structure of claim 1 , wherein each of the plurality of metal segments has a thickness between approximately 0.5 micron and approximately 1.0 micron.
4. The BAW structure of claim 3 , wherein each of the lower electrode and the upper electrode has a thickness between approximately 0.2 micron and approximately 0.5 micron.
5. The BAW structure of claim 4 , wherein the acoustic mirror further comprises a plurality of dielectric layers separating the plurality of metal segments.
6. The BAW structure of claim 5 , wherein each of the plurality of dielectric layers has a thickness between approximately 0.5 micron and approximately 1.0 micron.
7. The BAW structure of claim 1 , wherein the slope of each tapered sidewall of said plurality of metal segments and the slope of said at least one tapered sidewall of said lower electrode is approximately 45 degrees.
8. A bulk acoustic wave (BAW) structure comprising:
a lower electrode formed over a substrate, the lower electrode having at least one tapered sidewall;
a piezoelectric layer formed over the lower electrode;
an upper electrode formed over the piezoelectric layer; and
an acoustic mirror formed between the lower electrode and the substrate, the acoustic mirror comprising a plurality of metal segments, at least one of the plurality of metal segments having tapered sidewalls,
wherein each of the tapered sidewalls of the at least one of the plurality of metal segments has a slope angle of approximately 45 degrees.
9. The BAW structure of claim 8 , wherein the at least one tapered sidewall of the lower electrode has a slope angle of approximately 45 degrees.