Organic EL device and EL display panel having a low driving voltage and high light emitting frequency, and method for manufacturing
View Patent ↗Disclosed is a method for manufacturing an organic EL device which comprises a hole injection layer having a flat surface that is not contaminated. Specifically disclosed method for manufacturing an organic EL device, which comprises a step of forming an anode on a substrate; a step of forming a hole injection layer on the anode; a step of forming an inorganic film on the substrate and the hole injection layer; a step of forming a bank on the inorganic film in such a manner that at least a part of the inorganic film formed on the hole injection layer is exposed; a step of etching the exposed inorganic film by using the bank as a mask so that the hole injection layer is exposed therefrom; and a step of forming an organic light-emitting layer by applying an organic light-emitting material onto the exposed hole injection layer. The hole injection layer contains tungsten oxide or molybdenum oxide.
1. An organic EL device, comprising:
a substrate;
an anode arranged on the substrate;
a hole injection layer of transition metal oxide arranged on the anode;
an organic light emitting layer arranged on the hole injection layer;
a cathode arranged on the organic light emitting layer;
an inorganic film arranged on the substrate; and
a bank comprising a fluorine-containing resin arranged on the inorganic film;
wherein:
the bank and the inorganic film define a region of the organic light emitting layer, and an edge of a top surface of the organic light emitting layer contacts a face of the bank;
a distance between an end portion of a bottom face of the bank and an end portion of a top face of the inorganic film is not greater than 5 μm; and
a bottom face of the inorganic film extends in a region defined by the bank and the inorganic film that is beyond the top face of the inorganic film,
a wettability of a top face of the bank is lower than a wettability of a wall face of the bank; and
a wettability of the wall face of the bank is lower than a wettability of the inorganic film.
2. The organic EL device according to claim 1 , wherein the bank has a forward tapered shape.
3. The organic EL device according to claim 1 , wherein:
the thickness of the inorganic film is from 5 nm to 100 nm; and
the material of the inorganic film is selected from the group consisting of silicon, silicon oxide, silicon nitride and silicon oxynitride.
4. The organic EL device according to claim 1 , wherein:
the thickness of the inorganic film is from 5 nm to 100 nm; and
the material of the inorganic film is selected from the group consisting of chromium, nickel, copper, aluminum, silver, gold, platinum, APC, ITO, AL-Nd alloy, and titanium.
5. The organic EL device according to claim 1 , wherein the anode and the hole injection layer are separated from the inorganic film.
6. An organic EL display panel comprising two or more organic EL devices according to claim 1 arranged on the same plane, wherein:
the material of the inorganic film is selected from the group consisting of chromium, nickel, copper, aluminum, silver, gold, platinum, APC, ITO, AL-Nd alloy and titanium; and
the inorganic films of the neighboring organic EL devices are separated from each other.
7. An organic EL display panel comprising two or more organic EL devices according to claim 1 arranged on the same plane, wherein:
the material of the inorganic film is selected from the group consisting of silicon, silicon oxide, silicon nitride, and silicon oxynitride;
the inorganic films of the neighboring organic EL devices are connected to each other; and
the connected inorganic films form a grid.
8. The organic EL device according to claim 1 , wherein a cross-sectional shape of the bank and the inorganic film are substantially inclined with respect to a transverse plane of the substrate.
9. The organic EL device according to claim 1 , wherein a thickness of the organic film is between 5 nm to 100 nm.
10. The organic EL device according to claim 1 , wherein the inorganic film has a forward tapered shape.