Optical semiconductor device
View Patent ↗An optical semiconductor device in which light having a wavelength of 1.25 μm or greater is waveguided, includes: a first waveguide of embedded type that includes a semiconductor and is lattice-matched with InP, the first waveguide having a region having a first constant width equal to or greater than 1.50 μm and a first region narrower than the region; and a second waveguide of embedded type that includes another semiconductor having a refractive index different from that of the first waveguide, the second waveguide having a region having a second constant width smaller than 1.50 μm and a second region wider than said region. The first waveguide and the second waveguide are joined at an intermediate waveguide portion. The intermediate waveguide portion includes the first region and the second region and a joining plane on which the first region and the second region are joined. The joining plane has a width equal to or smaller than 1.35 μm.
1. An optical semiconductor device in which light having a wavelength of 1.25 μm or greater is waveguided, comprising:
a first waveguide of embedded type that includes a semiconductor and is lattice-matched with InP, the first waveguide having a region having a first constant width equal to or greater than 1.50 μm and a first region narrower than the region having the first constant width equal to or greater than 1.50 μm; and
a second waveguide of embedded type that includes another semiconductor having a refractive index different from that of the first waveguide, the second waveguide having a region having a second constant width smaller than 1.50 μm and a second region wider than said region having the second constant width smaller than 1.50 μm,
the first waveguide and the second waveguide being joined at an intermediate waveguide portion,
the intermediate waveguide portion including the first region and the second region and a joining plane on which the first region and the second region are joined, and
the joining plane having a width equal to or smaller than 1.35 μm.
2. The optical semiconductor device according to claim 1 , wherein the first waveguide comprises an active layer of a semiconductor laser, and the second waveguide comprises a light absorbing layer of the semiconductor laser.
3. The optical semiconductor device according to claim 2 , wherein cores of the first and second waveguides comprise InGaAsP, AlInGaAs or a multilayer structure thereof.
4. The optical semiconductor device according to claim 1 , further comprising contact layers respectively provided on a constant width portion of the first waveguide and a constant width portion of the second waveguide, and a space region between the contact layers is provided on the intermediate waveguide portion.
5. The optical semiconductor device according to claim 4 , wherein a part of one of the contact layers is positioned above the intermediate waveguide portion.