Correlation standard for calibrating a scanning electron microscope
View Patent ↗A correlation standard for calibrating a scanning electron microscope is provided. The correlation standard comprises a pellet and a metal stub. The pellet comprises a compressed mixture of carbon powder and alumina powder. The pellet is attached to the metal stub with a conductive adhesive.
1. A correlation standard for calibrating a scanning electron microscope (SEM), the correlation standard comprising:
a pellet comprising a compressed mixture of carbon powder and alumina powder for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background; and
a metal stub, wherein the pellet is attached to the metal stub with a conductive adhesive.
2. The correlation standard of claim 1 , wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1.
3. The correlation standard of claim 1 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.
4. The correlation standard of claim 1 , wherein the alumina powder comprise particles between 0.5 and 5 micrometers in diameter.
5. The correlation standard of claim 1 , wherein an exposed surface of the pellet is planar.
6. The correlation standard of claim 1 , wherein the conductive adhesive comprises at least one of carbon and silver.
7. A method for fabricating a correlation standard for calibrating a scanning electron microscope (SEM), the method comprising:
mixing carbon powder with alumina powder;
compressing the mixture into a pellet for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background; and
attaching the pellet to a metal stub with a conductive adhesive.
8. The method of claim 7 , wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1.
9. The method of claim 7 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.
10. The method of claim 9 , wherein the carbon powder and the alumina powder are mixed for a duration of 15 minutes.
11. The method of claim 7 , wherein the carbon powder and the alumina powder are mixed at ambient room temperature.
12. The method of claim 7 , wherein the alumina powder comprise particles between 0.5 and 5 micrometers in diameter.
13. The method of claim 7 , wherein the mixture is compressed into the pellet with a hydraulic press.
14. The method of claim 7 , wherein the mixture is compressed into the pellet using between 3 and 3.5 tons.
15. The method of claim 7 , wherein the mixture is compressed for a duration of between 5 and 10 seconds.
16. The method of claim 7 , wherein an exposed surface of the pellet is planar.
17. The method of claim 7 , wherein the conductive adhesive comprises at least one of carbon and silver.
18. A correlation standard for calibrating a scanning electron microscope (SEM), the correlation standard comprising:
a pellet comprising a compressed mixture of carbon powder and alumina powder for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background, wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1, and wherein the alumina powder comprises particles between 0.5 and 5 micrometers in diameter; and
a metal stub attached to the pellet with a conductive adhesive, the conductive adhesive comprising at least one of carbon and silver.
19. The correlation standard of claim 18 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.