IP Library Granted Patent US 8,596,107
Granted Patent B1
US 8,596,107 · App. 12/750,472 · Granted Dec 3, 2013

Correlation standard for calibrating a scanning electron microscope

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Quick Facts
Patent No.
US 8,596,107
App. No.
12/750,472
Granted
Dec 3, 2013
Kind
B1
Abstract

A correlation standard for calibrating a scanning electron microscope is provided. The correlation standard comprises a pellet and a metal stub. The pellet comprises a compressed mixture of carbon powder and alumina powder. The pellet is attached to the metal stub with a conductive adhesive.

Claims (26)

1. A correlation standard for calibrating a scanning electron microscope (SEM), the correlation standard comprising:

a pellet comprising a compressed mixture of carbon powder and alumina powder for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background; and

a metal stub, wherein the pellet is attached to the metal stub with a conductive adhesive.

2. The correlation standard of claim 1 , wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1.

3. The correlation standard of claim 1 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.

4. The correlation standard of claim 1 , wherein the alumina powder comprise particles between 0.5 and 5 micrometers in diameter.

5. The correlation standard of claim 1 , wherein an exposed surface of the pellet is planar.

6. The correlation standard of claim 1 , wherein the conductive adhesive comprises at least one of carbon and silver.

7. A method for fabricating a correlation standard for calibrating a scanning electron microscope (SEM), the method comprising:

mixing carbon powder with alumina powder;

compressing the mixture into a pellet for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background; and

attaching the pellet to a metal stub with a conductive adhesive.

8. The method of claim 7 , wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1.

9. The method of claim 7 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.

10. The method of claim 9 , wherein the carbon powder and the alumina powder are mixed for a duration of 15 minutes.

11. The method of claim 7 , wherein the carbon powder and the alumina powder are mixed at ambient room temperature.

12. The method of claim 7 , wherein the alumina powder comprise particles between 0.5 and 5 micrometers in diameter.

13. The method of claim 7 , wherein the mixture is compressed into the pellet with a hydraulic press.

14. The method of claim 7 , wherein the mixture is compressed into the pellet using between 3 and 3.5 tons.

15. The method of claim 7 , wherein the mixture is compressed for a duration of between 5 and 10 seconds.

16. The method of claim 7 , wherein an exposed surface of the pellet is planar.

17. The method of claim 7 , wherein the conductive adhesive comprises at least one of carbon and silver.

18. A correlation standard for calibrating a scanning electron microscope (SEM), the correlation standard comprising:

a pellet comprising a compressed mixture of carbon powder and alumina powder for adjusting a brightness and/or a contrast of an SEM image of the SEM, wherein the pellet is configured such that the SEM image displays alumina on a carbon background, wherein the ratio of carbon powder to alumina powder in the mixture is between 200:1 and 150:1, and wherein the alumina powder comprises particles between 0.5 and 5 micrometers in diameter; and

a metal stub attached to the pellet with a conductive adhesive, the conductive adhesive comprising at least one of carbon and silver.

19. The correlation standard of claim 18 , wherein the mixture comprises 0.2 grams of carbon powder and 0.001 grams of alumina powder.

Assignments (6)
RELEASE OF SECURITY INTEREST AT REEL 038744 FRAME 0481 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058982/0556 →
RELEASE OF SECURITY INTEREST Recorded Mar 5, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 045501/0714 →
SECURITY AGREEMENT Recorded May 17, 2016
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038722/0229 →
SECURITY AGREEMENT Recorded May 17, 2016
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038744/0281 →
SECURITY AGREEMENT Recorded May 17, 2016
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038744/0481 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 2, 2010
From: WONGDAO, WIPAWAN; WONGBUNNAK, YONGYUT
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 024475/0875 →