Magnetostrictive torque sensor and method of manufacturing same
A magnetostrictive torque sensor includes a single magnetostrictive film disposed on a steering shaft, and first and second coils for detecting changes in a magnetic property of the magnetostrictive film. The single magnetostrictive film includes a first anisotropic region and a second anisotropic region, having respective magnetic anisotropies inverse to each other. The first coil is disposed in confronting relation to the first anisotropic region, whereas the second coil is disposed in confronting relation to the second anisotropic region.
1. A magnetostrictive torque sensor comprising:
a shaft member;
at least one magnetostrictive film disposed on the shaft member; and
a plurality of coils for detecting a change in a magnetic property of the magnetostrictive film;
wherein the at least one magnetostrictive film includes a plurality of regions having different magnetic anisotropies formed therein via localized high-frequency heating after the film has been disposed on the shaft member.
2. A magnetostrictive torque sensor according to claim 1 , wherein the coils are disposed in confronting relation to a region of constant thickness of the magnetostrictive film.
3. A magnetostrictive torque sensor according to claim 1 , wherein the at least one magnetostrictive film comprises a single magnetostrictive film disposed on the shaft member;
the single magnetostrictive film includes a first anisotropic region and a second anisotropic region having respective magnetic anisotropies inverse to each other as the different magnetic anisotropies; and
the coils are disposed in confronting relation to the first anisotropic region and the second anisotropic region, respectively.
4. A magnetostrictive torque sensor according to claim 1 , wherein the at least one magnetostrictive film is deposited on the shaft member by Ni—Fe plating.
5. A magnetostrictive torque sensor according to claim 1 , wherein the localized high-frequency heating of the magnetostrictive film is conducted while a torsional torque is applied to the shaft member to form the regions having different magnetic anisotropies.
6. A magnetostrictive torque sensor according to claim 1 , wherein the at least one magnetostrictive film is a single magnetostrictive film including the plurality of regions having different magnetic anisotropies formed therein.
7. A method of manufacturing a magnetostrictive torque sensor comprising a shaft member, at least one magnetostrictive film mounted on the shaft member, and a plurality of coils for detecting a change in a magnetic property of the magnetostrictive film, wherein the at least one magnetostrictive film includes a plurality of different magnetic anisotropies, the method comprising the steps of:
forming the at least one magnetostrictive film on a surface of the shaft member; and
high-frequency heating the magnetostrictive film while a torsional torque is applied to the shaft member.
8. A method according to claim 7 , wherein the step of high-frequency heating the magnetostrictive film comprises the steps of:
placing a heating coil in a position facing a first region of the magnetostrictive film on the shaft member, and high-frequency heating the first region of the magnetostrictive film while the torsional torque is applied in one direction to the shaft member, thereby developing a magnetic anisotropy in the first region of the magnetostrictive film; and
placing the heating coil in a position facing a second region of the magnetostrictive film on the shaft member, and high-frequency heating the second region of the magnetostrictive film while the torsional torque is applied in another direction to the shaft member, thereby developing a magnetic anisotropy in the second region of the magnetostrictive film.
9. A method according to claim 7 , wherein the step of forming the at least one magnetostrictive film on the shaft member comprises the step of:
forming the at least one magnetostrictive film on a surface of the shaft member by Ni—Fe plating.