IP Library Granted Patent US 8,756,978
Granted Patent B2
US 8,756,978 · App. 12/757,631 · Granted Jun 24, 2014

Leak detector with optical tracer gas detection

Inventors: Vladimir Schwartz (Lexington, MA); Daniel Wetzig (Cologne, DE); Boris Chernobrod (Santa Fe, NM)
Assignee: Inficon GmbH
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Quick Facts
Patent No.
US 8,756,978
App. No.
12/757,631
Granted
Jun 24, 2014
Kind
B2
Abstract

A leak detector comprises a cell provided with a tracer gas inlet preferably permeable to a tracer gas. In the cell, the tracer gas is caused to assume an energetically higher metastable state. By means of laser spectroscopy the absorption spectrum of the metastable tracer gas is sampled in an optical measuring section, whereby the presence of tracer gas is detected.

Claims (13)

1. A leak detector with optical tracer gas recognition, comprising:

a cell with a tracer gas inlet comprising a membrane selectively or exclusively permeable to a tracer gas,

an excitation device in the cell for causing the tracer gas to assume an energetically higher metastable state, and

an optical measuring section formed by a laser and a photo detector receiving the laser beam,

wherein the cell comprises an electron source that uses electron impacts to cause the tracer gas to assume the metastable state.

2. The leak detector of claim 1 , wherein the cell is connected to a vacuum pump device.

3. A leak detector with optical tracer gas recognition, comprising:

a cell with a tracer gas inlet comprising a first membrane preferably selectively or exclusively permeable to a tracer gas,

an excitation device in the cell for causing the tracer gas to assume an energetically higher metastable state, and

an optical measuring section formed by a laser and a photo detector receiving the laser beam,

wherein the cell additionally comprises a pump connection with a second membrane selectively or exclusively permeable to the tracer gas, wherein the pump connection connects the cell to a pump chamber which in turn is connected to a vacuum pump device.

4. The leak detector of claim 3 , wherein the pump chamber comprises a buffer gas connection and a pump connection.

5. The leak detector of claim 1 , wherein the cell is sealed hermetically except for the tracer gas inlet, with a partial pressure of the tracer gas developing within the cell that is equal to the partial pressure of the tracer gas in the ambience.

Assignments (3)
MERGER Recorded Feb 3, 2021
From: INFICON GMBH
To: INFICON HOLDING AG
Reel/Frame 055135/0731 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 19, 2011
From: INFICON GMBH
To: INFICON GMBH
Reel/Frame 026147/0627 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 27, 2010
From: SCHWARTZ, VLADIMIR; WETZIG, DANIEL; CHERNOBROD, BORIS
To: INFICON GMBH
Reel/Frame 024598/0282 →
Continuity (1)
Related Publication 20110247400A1 · Oct 13, 2011