IP Library Granted Patent US 7,964,903
Granted Patent B2
US 7,964,903 · App. 12/762,485 · Granted Jun 21, 2011

Thin film transistor array panel for x-ray detector

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Quick Facts
Patent No.
US 7,964,903
App. No.
12/762,485
Granted
Jun 21, 2011
Kind
B2
Abstract

A thin film transistor array panel for an X-ray detector includes a dummy pixel including a photo diode and a TFT for detecting leakage current. The photo diode includes first and second electrodes ( 178,195 ) facing each other and a photo-conductive layer ( 800 ) disposed between the first electrode and the second electrode. The TFT includes a semiconductor layer ( 150 ), a gate electrode ( 123 ), a source electrode ( 173 ) connected to a data line, a drain electrode ( 175 ) connected to the photo diode. The dummy pixel further includes a light blocking layer ( 196 ) for blocking light incident on the photo diode. Alternatively, the semiconductor layer is disconnected between the source electrode and the drain electrode.

Claims (27)

1. A thin film transistor array panel for an X-ray detector, the thin film transistor array panel comprising:

a gate wire formed on an insulating substrate and comprising a gate line and a gate electrode connected to the gate line;

a gate insulating layer formed on the gate wire;

a semiconductor layer formed on the gate insulating layer;

a data wire formed on the gate insulating layer and comprising:

a data line which intersects the gate line;

a source electrode connected to the data line and disposed on the semiconductor layer; and

a drain electrode disposed on the semiconductor layer separate from the source electrode;

a photo diode comprising:

a first electrode connected to the drain electrode;

a second electrode which faces the first electrode; and

a photo-conductive layer disposed between the first electrode and the second electrode;

a passivation layer disposed on the photodiode, the semiconductor layer, the data wire and the drain electrode, the passivation layer having a first contact hole which exposes the second electrode;

a bias signal line disposed on the passivation layer and connected to the second electrode through the first contact hole; and

a light blocking layer disposed directly on the passivation layer and the bias signal line to cover the photo diode.

2. The thin film transistor array panel of claim 1 , wherein the photo-conductive layer comprises a first amorphous silicon film comprising an N type impurity, a second amorphous silicon film disposed on the first amorphous silicon film and comprising intrinsic amorphous silicon, and a third amorphous silicon film disposed on the second amorphous silicon film and comprising a P type impurity.

3. The thin film transistor array panel of claim 2 , wherein the second electrode comprises transparent conductive oxide.

4. The thin film transistor array panel of claim 1 , further comprising an insulating layer interposed between the light blocking member and the bias signal line.

5. The thin film transistor array panel of claim 1 , wherein at least a portion of the bias signal line is disposed between the passivation layer and the light blocking layer.

6. The thin film transistor array panel of claim 5 , further comprising an insulating layer interposed between the light blocking member and the bias signal line.

7. The thin film transistor array panel of claim 6 , wherein the second electrode comprises transparent conductive oxide.

8. The thin film transistor array panel of claim 1 , wherein the bias signal line and the data line are extended along the same direction.

9. The thin film transistor array panel of claim 8 , further comprising an auxiliary data line connected to the data line through a second contact hole of the passivation layer which exposes the data line.

10. The thin film transistor array panel of claim 9 , wherein the photo-conductive layer comprises a first amorphous silicon film comprising an N type impurity, a second amorphous silicon film disposed on the first amorphous silicon film and comprising intrinsic amorphous silicon, and a third amorphous silicon film disposed on the second amorphous silicon film and comprising a P type impurity.

11. The thin film transistor array panel of claim 10 , wherein the second electrode comprises transparent conductive oxide.

12. The thin film transistor array panel of claim 11 , further comprising an insulating layer interposed between the light blocking member and the bias signal line.

13. The thin film transistor array panel of claim 9 , wherein at least a portion of the bias signal line is disposed between the passivation layer and the light blocking layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2012
From: SAMSUNG ELECTRONICS CO., LTD.
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 029151/0055 →