Manufacturing method of light-emitting diode

1. A manufacturing method of a light-emitting diode, comprising:

successively growing a first clad layer, an active layer and a second clad layer on a substrate; and

patterning the first clad layer, the active layer and the second clad layer into a specified plane shape, and causing at least a part of an outer peripheral part of the active layer to protrude to an outside from at least one of the first clad layer and the second clad layer;

wherein the first clad layer, the active layer and the second clad layer are patterned by dry etching;

wherein at least one of the first clad layer and the second clad layer is side-etched with respect to the active layer, and at least the part of the outer peripheral part of the active layer protrudes to the outside from at least one of the first clad layer and the second clad layer; and

wherein the side etching is performed by wet etching.

2. The manufacturing method of the light-emitting diode according to claim 1 , wherein after the first clad layer, the active layer and the second clad layer are patterned by the dry etching, an end face of the active layer is altered in quality before the side etching is performed by the wet etching.

3. The manufacturing method of the light-emitting diode according to claim 2 , wherein the active layer has a multiple quantum well structure.

4. The manufacturing method of the light-emitting diode according to claim 3 , wherein the first clad layer, the active layer and the second clad layer are made of phosphorous-based compound semiconductors.

5. The manufacturing method of the light-emitting diode according to claim 4 , wherein the wet etching is performed using an etchant made of hydrochloric acid cooled to a low temperature of 5 ° C. or lower.

6. The manufacturing method of the light-emitting diode according to claim 5 , wherein after the wet etching is performed, the first clad layer, the active layer and the clad layer have end faces of (111) surfaces.