Display device using MEMS element and manufacturing method thereof
View Patent ↗The present invention relates to a display device using a microelectromechanical system (MEMS) and to a manufacturing method thereof. A display device using a MEMS includes a first substrate comprising a first index of refraction; a second substrate facing the first substrate; a reflective layer formed on the first substrate and having a first aperture; a transparent layer covering the first aperture and comprising a second refractive index; and a shutter arranged on the second substrate, wherein a difference between the first refractive index and the second refractive index is equal to or less than 0.1.
1. A display device using a microelectromechanical system (MEMS), comprising:
a first substrate comprising a refractive first index;
a second substrate facing the first substrate;
a reflective layer arranged on the first substrate and comprising a first aperture;
a transparent layer arranged in the first aperture and comprising a second refractive index; and
a shutter arranged on the second substrate,
wherein an upper surface of the transparent layer faces the shutter with a gap therebetween.
2. The display device of claim 1 , wherein
at least one of a first lateral surface of the first aperture and a second lateral surface of the transparent layer is obliquely inclined with respect to a surface of the first substrate.
3. The display device of claim 2 , wherein
an angle between the surface of the first substrate and at least one of the first lateral surface and the second lateral surface is between 0 and 90 degrees.
4. The display device of claim 2 , wherein
a surface of the transparent layer is rough.
5. The display device of claim 4 , wherein
the transparent layer is porous.
6. The display device of claim 5 , wherein
the transparent layer further comprises a dielectric material.
7. The display device of claim 1 , wherein
a surface of the transparent layer is rough.
8. The display device of claim 7 , wherein
the transparent layer is porous.
9. The display device of claim 1 , wherein
the transparent layer is porous.
10. The display device of claim 1 , further comprising:
a backlight unit disposed under the first substrate.
11. The display device of claim 10 , wherein
a surface of the transparent layer is rough.
12. The display device of claim 10 , wherein
the transparent layer is porous.
13. The display device of claim 1 , further comprising:
an assistance reflective layer disposed between the first substrate and the reflective layer,
wherein the assistance reflective layer comprises:
at least two layers comprising different refractive indices from each other; and
a second aperture corresponding to the first aperture.
14. The display device of claim 1 , further comprising:
a light-blocking layer arranged on the second substrate and comprising a third aperture, wherein the third aperture faces the first aperture.
15. The display device of claim 1 , wherein
the transparent layer is arranged on the entire surface of the reflective layer.
16. The display device of claim 15 , wherein
a surface of the transparent layer is rough.
17. The display device of claim 15 , wherein
the transparent layer is porous.
18. The display device of claim 1 , wherein a difference between the first refractive index and the second refractive index is equal to or less than 0.2.
19. A method for manufacturing a display device using a microelectromechanical system (MEMS), comprising:
forming a reflective layer comprising a first aperture on a first substrate;
forming a transparent layer in the first aperture;
forming a shutter on a second substrate; and
coupling the first substrate and the second substrate so that an upper surface of the transparent layer faces the shutter with a gap therebetween.
20. The method of claim 19 , wherein
forming the transparent layer comprises:
coating a hardening material comprising a plurality of grains on the first substrate;
hardening the coated hardening material to form a hardened transparent layer; and
removing the plurality of grains from the hardened transparent layer.
21. The method of claim 19 , further comprising surface treating the transparent layer.
22. The method of claim 19 , wherein the first substrate comprises a first refractive index, the transparent layer comprises a second refractive index, and a difference between the first refractive index and the second refractive index is equal to or less than 0.2.