Isolated wire bond in integrated electrical components
View Patent ↗An electrical component includes a semiconductor layer having a first conductivity type and a interconnect layer disposed adjacent to a frontside of the semiconductor layer. At least one bond pad is disposed in the interconnect layer and formed adjacent to the frontside of the semiconductor layer. An opening formed from the backside of the semiconductor layer and through the semiconductor layer exposes at least a portion of the bond pad. A first region having a second conductivity type extends from the backside of the semiconductor layer to the frontside of the semiconductor layer and surrounds the opening. The first region can abut a perimeter of the opening or alternatively, a second region having the first conductivity type can be disposed between the first region and a perimeter of the opening.
1. A back-illuminated image sensor comprising:
a semiconductor substrate layer having a frontside and a backside opposite the frontside, wherein the semiconductor substrate layer has a first conductivity type and has at least one image sensor pixel circuit formed therein;
an interconnect layer disposed on the frontside of the semiconductor substrate layer, wherein the interconnect layer includes a bond pad that is disposed on the frontside of the semiconductor substrate layer and is coupled to the image sensor pixel circuit;
an opening through the semiconductor substrate layer exposing at least a portion of the bond pad; and
a first region having a second conductivity type disposed in a portion of the semiconductor substrate layer surrounding the opening and extending from the backside of the semiconductor substrate layer to the frontside of the semiconductor substrate layer, wherein the second conductivity type is opposite the first conductivity type.
2. The back-illuminated image sensor as in claim 1 , further comprising a wire disposed in each opening and affixed to the bond pad.
3. The back-illuminated image sensor as in claim 1 , wherein the first region surrounds and abuts a perimeter of the opening and extends from the backside of the semiconductor substrate layer to the frontside of the semiconductor substrate layer.
4. The back-illuminated image sensor as in claim 1 , wherein the first conductivity type comprises a p conductivity type and the second conductivity type comprises an n conductivity type.