Solid-state image pickup device, method of manufacturing solid-state image pickup device, and electronic apparatus
View Patent ↗Disclosed herein is a solid-state image pickup device including a solid-state image pickup element operable to produce an electric charge according to the amount of light received, a lens disposed on the upper side of a pixel of the solid-state image pickup element, a protective film which covers the upper side of the lens and a surface of which is flattened, and a surface film which is formed at the surface of the protective film and which is higher in hydrophilicity than the inside of the protective film.
1. A solid-state image pickup device comprising:
a solid-state image pickup element operable to produce an electric charge according to the amount of light received;
a lens disposed on an upper side of a pixel of the solid-state image pickup element;
a protective film which covers an upper side of the lens and a surface of which is flattened;
a surface film which is formed at the surface of the protective film and is higher in hydrophilicity than an inside of the protective film; and
a transparent substrate above the surface film,
wherein,
an air layer is formed between the surface film and the transparent substrate,
the protective film comprises a fluorine-containing silane compound, and
the surface film is lower in fluorine content than the inside of the protective film.
2. The solid-state image pickup device according to claim 1 , wherein the surface film is a film formed by subjecting the surface of the protective film to a plasma treatment using an oxygen-containing gas.
3. The solid-state image pickup device according to claim 1 , wherein the thickness of the protective layer is from 0.1 μm to 1 μm.
4. The solid-state image pickup device according to claim 3 , wherein the thickness of the protective layer is 0.4 μm.
5. A method of manufacturing a solid-state image pickup device, comprising the steps of:
forming a lens on an upper side of a pixel of a solid-state image pickup element;
covering the lens with a protective film and flattening a surface of the protective film;
forming at the surface of the protective film a surface film which is higher in hydrophilicity than an inside of the protective film; and
forming a transparent substrate above the surface film,
wherein,
an air layer is formed between the surface film and the transparent substrate,
the protective film comprises a fluorine-containing silane compound, and
the surface film is lower in fluorine content than the inside of the protective film.
6. The method according to claim 5 , wherein the surface film is formed by subjecting the surface of the protective film to a plasma treatment using an oxygen-containing gas.