Quality control process for UMG-SI feedstock
View Patent ↗A quality control process for determining the concentrations of boron and phosphorous in a UMG-Si feedstock batch is provided. A silicon test ingot is formed by the directional solidification of molten UMG-Si from a UMG-Si feedstock batch. The resistivity of the silicon test ingot is measured from top to bottom. Then, the resistivity profile of the silicon test ingot is mapped. From the resistivity profile of the silicon test ingot, the concentrations of boron and phosphorous of the UMG-Si silicon feedstock batch are calculated. Additionally, multiple test ingots may be grown simultaneously, with each test ingot corresponding to a UMG-Si feedstock batch, in a multi-crucible crystal grower.
1. A control method for evaluating the quality of a UMG-Si feedstock, the method comprising the steps of:
performing a directional solidification of molten upgraded metallurgical-grade silicon (UMG-Si) from a UMG-Si feedstock batch to form a silicon test ingot;
measuring the resistivity from top to bottom of said silicon test ingot;
mapping the resistivity profile of said silicon test ingot;
calculating the phosphorus and boron concentrations of said UMG-Si feedstock batch based on said resistivity profile of said silicon test ingot; and
determining, based on the resistivity profile of said silicon test ingot, an amount of at least one co-dopant for use in said UMG-Si feedstock batch for increasing an ingot yield and producing an improved resistivity profile by directional solidification.
2. The method of claim 1 , wherein said step of calculating the phosphorus and boron concentrations of said selected UMG-Si feedstock batch based on said resistivity profile of said silicon test ingot further comprises the step of calculating the phosphorus and boron concentrations of said selected UMG-Si feedstock batch based on the yield of said silicon test ingot determined from said resistivity profile of said silicon test ingot.
3. The method of claim 1 , further comprising the step of determining SiC inclusions in said silicon test ingot through IR imaging analysis.
4. The method of claim 1 , further comprising the step of producing test wafers from said silicon test ingot.
5. The method of claim 1 , wherein the weight ratio of said silicon test ingot to said UMG-Si feedstock batch is greater than 2×10 −3 .
6. The method of claim 1 , wherein said silicon test ingot weighs approximately 15 kg.
7. The method of claim 1 , wherein said step of performing a directional solidification uses a dual directional solidification furnace that concentrates impurities on the top and one side of said silicon test ingot.
8. A control method for evaluating the quality of UMG-Si feedstock, the method comprising the steps of:
performing a simultaneous directional solidification of molten UMG-Si from a plurality of UMG-Si feedstock batches in a single crystal grower to form a plurality of silicon test ingots, wherein each of said plurality of silicon test ingots corresponds to a particular UMG-Si feedstock batch;
measuring the resistivity from top to bottom of each of said silicon test ingots;
mapping the resistivity profile of each of said silicon test ingots;
calculating the phosphorus and boron concentrations of each of said UMG-Si feedstock batches based on said resistivity profile of each of said corresponding silicon test ingot; and
determining, based on the resistivity profiles of said silicon test ingots, an amount of at least one co-dopant for use in said plurality of UMG-Si feedstock batches for increasing an ingot yield and producing an improved resistivity profile by directional solidification.
9. The method of claim 8 , wherein said step of performing a simultaneous directional solidification of molten UMG-Si from a plurality of UMG-Si feedstock batches in a single crystal grower to form a plurality of silicon test ingots, wherein each of said plurality of silicon test ingots corresponds to a particular UMG-Si feedstock batch further comprises performing a simultaneous directional solidification of molten UMG-Si from a plurality of UMG-Si feedstock batches in a single multi-crucible crystal grower to form a plurality of silicon test ingots, wherein each of said plurality of silicon test ingots corresponds to particular UMG-Si feedstock batch.
10. The method of claim 8 , wherein said step of calculating the phosphorus and boron concentrations of each of said UMG-Si feedstock batches based on said resistivity profile of each of said corresponding silicon test ingots further comprises the step of calculating the phosphorus and boron concentrations of each of said selected UMG-Si feedstock batches based on the yield of each of said silicon test ingots determined from said resistivity profile of each of said silicon test ingots.
11. The method of claim 8 , further comprising the step of determining SiC inclusions in said silicon test ingot through IR imaging analysis.
12. The method of claim 8 , further comprising the step of producing test wafers from each of said silicon test ingots.
13. The method of claim 8 , wherein the weight ratio of each of said silicon test ingots to each of said corresponding UMG-Si feedstock batches is greater than 2×10 −3 .
14. The method of claim 8 , wherein each of said silicon test ingots weighs approximately 15 kg.
15. The method of claim 8 , wherein said step of performing a directional solidification uses a dual directional solidification furnace that concentrates impurities on the top and one side of each of said silicon test ingots.
16. The method of claim 8 , wherein said step of performing a simultaneous directional solidification of molten UMG-Si from a plurality of UMG-Si feedstock batches in a single crystal grower to form a plurality of silicon test ingots, wherein each of said plurality of silicon test ingots corresponds to particular UMG-Si feedstock batch further comprises performing a simultaneous directional solidification of molten UMG-Si from a plurality of UMG-Si feedstock batches in a single multi-crucible crystal grower having an N×N crucible formation to form a plurality of silicon test ingots, wherein each of said plurality of silicon test ingots corresponds to a particular UMG-Si feedstock batch.