Etchant and method of manufacturing an array substrate using the same
View Patent ↗An etchant includes about 0.1 percent by weight to about 30 percent by weight of ammonium persulfate (NH 4 ) 2 S 2 O 8 , about 0.1 percent by weight to about 10 percent by weight of an inorganic acid, about 0.1 percent by weight to about 10 percent by weight of an acetate salt, about 0.01 percent by weight to about 5 percent by weight of a fluorine-containing compound, about 0.01 percent by weight to about 5 percent by weight of a sulfonic acid compound, about 0.01 percent by weight to about 2 percent by weight of an azole compound, and a remainder of water. Accordingly, the etchant may have high stability to maintain etching ability. Thus, manufacturing margins may be improved so that manufacturing costs may be reduced.
1. An etchant, comprising:
about 0.1 percent by weight to about 30 percent by weight of ammonium persulfate (NH 4 ) 2 S 2 O 8 ;
about 0.1 percent by weight to about 10 percent by weight of an inorganic acid;
about 0.1 percent by weight to about 10 percent by weight of an acetate salt;
about 0.01 percent by weight to about 5 percent by weight of a fluorine-containing compound;
about 0.01 percent by weight to about 5 percent by weight of a sulfonic acid compound;
about 0.01 percent by weight to about 2 percent by weight of an azole compound; and
a remainder of water,
wherein the etchant does not include hydrogen peroxide.
2. The etchant of claim 1 , wherein the inorganic acid comprises at least one selected from the group consisting of nitric acid, phosphoric acid, sulfuric acid, and hydrochloric acid.
3. The etchant of claim 1 , wherein the acetate salt comprises at least one selected from the group consisting of ammonium acetate (CH 3 COONH 4 ), lithium acetate (CH 3 COOLi), and potassium acetate (CH 3 COOK).
4. The etchant of claim 1 , wherein the fluorine-containing compound comprises at least one selected from the group consisting of sodium fluoride (NaF), sodium bifluoride (NaHF 2 ), ammonium fluoride (NH 4 F), ammonium bifluoride (NH 4 HF 2 ), ammonium fluoroborate (NH 4 BF 4 ), potassium fluoride (KF), potassium bifluoride (KHF 2 ), aluminum fluoride (A 1 F 3 ), fluoroboric acid (HBF 4 ), lithium fluoride (LiF), potassium tetrafluoroborate (KBF 4 ), and calcium fluoride (CaF 2 ).
5. The etchant of claim 1 , wherein the sulfonic acid compound comprises at least one selected from the group consisting of methanesulfonic acid (CH 3 SO 3 H), benzenesulfonic acid (C 6 H 5 SO 3 H), and p-toluenesulfonic acid (C 7 H 7 SO 3 H).
6. The etchant of claim 1 , wherein the azole compound comprises at least one selected from the group consisting of benzotriazole, aminotetrazole, aminotetrazole potassium salt, imidazole, and pyrazole.
7. The etchant of claim 1 , further comprising about 0.01 percent by weight to about 5 percent by weight of a boron-containing compound.
8. The etchant of claim 7 , wherein the boron-containing compound comprises at least one selected from the group consisting of borate (R 1 BO 3 , R 2 HBO 3 , R 3 H 2 BO 3 ), metaborate (R 3 BO 2 ), tetraborate (R 2 B 4 O 7 , R 3 HB 4 O 7 ), ammonium fluoroborate (NH 4 BF 4 ), fluoroboric acid (HBF 4 ), lithium fluoroborate (LiBF 4 ), sodium fluoroborate (NaBF 4 ), and potassium fluoroborate (KBF 4 ), wherein R 1 represents H 3 , Li 3 , Na 3 , (NH 4 ) 3 or K 3 ; R 2 represents Li 2 , Na 2 , K 2 or (NH 4 ) 2 ; and R 3 represents Li, Na, K or NH 4 .
9. The etchant of claim 1 , wherein the etchant is used for simultaneously etching a first metal layer including titanium and a second metal layer including copper formed on the first metal layer.
10. An etchant, comprising:
about 10 percent by weight to about 20 percent by weight of ammonium persulfate (NH 4 ) 2 S 2 O 8 ;
about 2 percent by weight to about 5 percent by weight of nitric acid;
about 2 percent by weight to about 5 percent by weight of ammonium acetate (CH 3 COONH 4 );
about 0.5 percent by weight to about 1 percent by weight of ammonium fluoride (NH 4 F);
about 0.05 percent by weight to about 1 percent by weight of methanesulfonic acid (CH 3 SO 3 H);
about 0.1 percent by weight to about 1.5 percent by weight of aminotetrazole; and
a remainder of water.
11. The etchant of claim 10 , further comprising about 0.01 percent by weight to about 5 percent by weight of a boron-containing compound.
12. The etchant of claim 11 , wherein the boron-containing compound comprises fluoroboric acid (HBF 4 ) in an amount of about 0.05% to about 3% by weight.